Post-growth thermal annealing, (TA) in combination with mesa-fabrication technologies, was applied to tune the shape and material composition of ZnCdSe quantum dots (QDs). The QDs were studied by means of photoluminescence spectroscopy. An enhancement of QD homogeneity due to TA is demonstrated by substantial narrowing of the QD emission, observed from large QD ensembles. Energy shifts of QD luminescence, exceeding 100 meV after thermal annealing, were observed. Tracing the evolution of single exciton lines, the activation energy of an enhanced diffusion process in small mesas was determined. Distinct changes of quantum dot symmetries were identified through a reduction of the exciton fine structure splitting.1 Introduction Post-growth thermal annealing (TA) is known as an efficient and powerful tool to modify the size and composition of semiconductors heterostructures. Up to now, several TA studies have been performed with quantum dots (QDs) and quantum wells (QWs). It has been demonstrated that by varying the temperature (T A ) or the time (t A ) during TA, the emission from low dimensional semiconductors, can be significantly enhanced and tuned over a wide range of wavelengths, due to an interdiffusion of atoms between the barrier and the quantum well or the quantum dot [1][2][3]. Interestingly, it is also possible to reduce the dimension of a semiconductor, locally, by means of TA. This has been demonstrated applying SiO 2 mask technologies, in combination with TA, to a CdTe/CdMgTe quantum well, by which a single quantum dot has been realized [4]. However, TA studies have been performed by the majority with QWs and large ensembles of QDs and preferentially in the III-V semiconductor systems [5][6][7]. Only a small number of investigations dealing with annealed II-VI semiconductors are known. Recently, the photoluminescence of a single quantum dot has been investigated. It has been demonstrated that TA of QDs, embedded in a small etched mesa, results in an enhancement of the biexciton emission [8]. Also the possibility to tune the fine structure splitting of quantum dot excitons by TA has been studied [9,10].We review recent investigations of thermally annealed ZnCdSe quantum dots. Details of the sample growth are presented in Section 2. The first part of Section 3 is dedicated to the description of the TA experiments performed with large quantum dot ensembles. In addition, in the second part of Section 3, also the photoluminescence of single quantum dots subject to TA is analyzed. TA induced diffusion is