Modification of the Optical and Structural Properties of a-Si1-XCX:H Films by Ion Implantation

Dimova‐Malinovska, D.

doi:10.1007/1-4020-4594-8_23

Functional Properties of Nanostructured Materials

2006

DOI: 10.1007/1-4020-4594-8_23

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Modification of the Optical and Structural Properties of a-Si1-XCX:H Films by Ion Implantation

D. Dimova‐Malinovska

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Modification of the Optical and Structural Properties of a-Si1-XCX:H Films by Ion Implantation

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References 18 publications

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