Modification of a-C:H films via nitrogen and silicon doping: The way to the superlubricity in moisture atmosphere

Wang, Kai; Yang, Baoping; Zhang, Bin; Chun, Bai; Mou, Zhixing; Gao, Kaixiong; Yushkov, G. Yu.; Окс, Е. М.

doi:10.1016/j.diamond.2020.107873

Cited by 36 publications

(17 citation statements)

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“…Another used technique consists of the doping of the film with different elements, such as boron, fluorine and nitrogen, which has been widely used to relieve the internal stress of the film [14][15][16].The effects of the nitrogen incorporating in DLC film is the reduction of the internal stress due to the decrease in the formation of carbon atoms with sp 3 hybridization. As a consequence, the film hardness is reduced and the DLC film adhesion on the substrate is facilitated, arousing interest in synthesis and application of these films [15][16][17][18][19][20][21]67].The production of DLC and N-DLC films by plasma enhanced chemical vapor deposition (PECVD) technique comes as a potential alternative of a surface treatment since it presents a relatively low cost, clean technology and formation of the homogeneous and uniform film [9,22]. This technique is being the focus of research for DLC film formation in Ti 6 Al 4 V alloy for space application [23], for application of DLC film in 316L stainless steel to act as anti-bactericidal agent in biomedical device [24], used to produce DLC film on inner surface of a long stainless steel tube [25], used to show the beneficial effects on the increased electrochemical activity of the DLC film doped with nitrogen [16,26] and to investigate the lubricating effect of the DLC film doped with nitrogen deposited on 3024 stainless steel to improve the tribocorrosion properties of the studied material [27].Since nitrogen is a low cost and environmentally friendly gas, it could be used to modify the undesirable properties of the DLC film, maintaining the high hardness and low coefficient of friction characteristic of the a-C:H films.…”

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confidence: 99%

“…The effects of the nitrogen incorporating in DLC film is the reduction of the internal stress due to the decrease in the formation of carbon atoms with sp 3 hybridization. As a consequence, the film hardness is reduced and the DLC film adhesion on the substrate is facilitated, arousing interest in synthesis and application of these films [15][16][17][18][19][20][21]67].…”

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confidence: 99%

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Effect of nitrogen in the properties of diamond-like carbon (DLC) coating on Ti₆Al₄V substrate

Almeida

Souza

Costa

et al. 2020

Mater. Res. Express

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The great interest in the study of diamond-like carbon films (a-C:H) is justified by its mechanical and tribological properties. However, the high internal stress of the film results in its difficult adhesion to the metallic substrate, which can be solved by nitrogen incorporation in the a-C:H film, allowing a formed film of lower internal stress. The objective of this work is to evaluate the influence of flow (20, 30 and 40sccm), CH 4 /Ar ratio (90/10 and 70/30) and voltage (400, 500, 600 and 700 V) in the a-C:H formation. For the best condition of the film, we studied the effect of nitrogen incorporation in the hardness and wear resistance of the a-C:H(N), modifying the nitrogen percentage in the treatment at 10% to 60% N 2 . The treatments were carried out in the Ti 6 Al 4 V substrate by DC-PECVD for two hours. For good adhesion of the films on the substrate, a silicon interlayer must be produced. The increase in the voltage above 600 V increases the I D /I G and film thickness, causing its delamination, and the gas ratio did not influence the a-C:H characteristics. The a-C:H film deposited with 30 sccm, 90/10 and 500 V was characterized as a-C:H (hard), with properties such as the hardness of 17 GPa, 30% H, 39% sp 3 and I D /I G ratio of 0.58. Since nitrogen reduced the deposition rate, the total gas flow for the production of a-C:H(N) was performed with 40 sccm. The Raman spectra of a-C:H(N) films showed changes in D band intensity and displacement in relation to the nitrogen-free film spectrum, evidencing the incorporation of nitrogen in the film. The XPS analysis showed the linear increase of the nitrogen incorporation in the a-C:H(N) film with the increase of the amount of the N 2 gas in the treatment, which caused, in general, a decrease in the amount of C-C sp 3 bonding, increasing the adhesion of the film in the substrate and not necessarily the low wear resistance of the formed film.According to Robertson [4] the DLC film that presents hydrogen concentrations between 30 and 50% receives the nomenclature of hydrogenated amorphous carbon (a-C:H), and presents lower hardness and internal stress than ta-C, facilitating the adhesion process of the film in the metallic substrates. This occurs due to sp 2 bonds formed in detriment of sp 3 bonds.The DLC films have been used in a variety of applications due to their notable properties, as protective coatings against wear and corrosion, in optical windows (optical filters), data storage hard drives, high performance automotive parts, coatings for biomedical products and electromechanical microdevices [9][10][11][12].However, as reported by Chen et al [13] and confirmed by Cemin et al [11], the high intrinsic compressive stress of the film, the high variation of the elastic coefficient, the difference in thermal expansion and the low chemical affinity between DLC and substrate difficult the adhesion process of the DLC film mainly when deposited on metallic surfaces. Thus, the use of techniques as oxide layer removal and the use of film interlayer previously to ...

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confidence: 99%

mentioning

confidence: 99%

Effect of nitrogen in the properties of diamond-like carbon (DLC) coating on Ti₆Al₄V substrate

Almeida

Souza

Costa

et al. 2020

Mater. Res. Express

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“…To deeply understand the information of Raman spectra, a variation of half‐maximum width of G peaks (G FWHM ) and I D /I G from the mating material of uncoated‐GCr15, Al 2 O 3 , ZrO 2 , Si 3 N 4 , and a‐C:H(GCr15) are given in Figure 7F. The G FWHM is an important indicator to measure the carbon crystallinity 18 . Generally, a carbon‐based film with a high degree of order has a narrower half‐value width, whereas a disordered amorphous carbon structure has a larger one.…”

Section: Resultsmentioning

confidence: 99%

“…Besides, the deposition methods determine its nature of DLC film. Usually, superhard tetrahedral carbon (ta‐C) film is grown by filtered cathodic vacuum arc (FCVA), 12,13 hydrogenated tetrahedral amorphous carbon (ta‐C:H) film is obtained via electron cyclotron wave resonance (ECR) plasma system, 14 and (hydrogenated) amorphous carbon (a‐C:(H)) films are deposited from plasma assistant chemical vapor deposition (PECVD) 15–18 and magnetron sputtering technology 16 . Among them, magnetron sputtering, due to its less equipment requirements, low cost and more flexibility, has been taken more attention via science and engineering 17 .…”

Section: Introductionmentioning

confidence: 99%

Achieving ultra‐low friction of a‐C:H film grown on 9Cr18Mo steel for industrial application via programmable high power pulse magnetron sputtering

Sun

Jia

Zhang

et al. 2021

Surface & Interface Analysis

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Owing to the high hardness and hydrogen passivation of carbon bonds, hydrogenated diamond‐like carbon (a‐C:H) film has shown promising potential to achieve ultra‐low friction and wear on steel surfaces. Here, a‐C:H film was successfully deposited on 9Cr18Mo steel via programmable high power pulse magnetron sputtering and potential application for industrial was evaluated. The a‐C:H films against different mating materials of GCr15 steel balls, Al2O3, Si3N4, ZrO2, and a‐C:H‐coated GCr15 balls all showed ultra‐low friction under a normal load of 5 N in a dry ambient air environment. Among them, self‐mating tribo‐system a‐C:H films on steel surfaces and a‐C:H‐coated steel balls achieve best friction performance; the principal reason is that both contacting surfaces coated with a‐C:H film have the lower electron affinities compared with other tribo‐systems. However, the differences of coefficient of friction (COF) for uncoated‐GCr15, Al2O3, ZrO2, Si3N4, and a‐C:H(GCr15) balls can be attributed to different sizes of clustering in wear debris. This work provides new insights on synthesis and industry application of the a‐C:H films with ultra‐low friction properties.

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“…The analysis of published data on the triboinduced graphitization of the interface layer for TMD+C and a-C(H) coatings and their comparison with the results of this work showed that S atoms incorporated into the a-C(H) phase during the RPLD of Mo–S–C–H_5.5 films did not have a significant effect on the formation of tribofilms during friction in a dry atmosphere. The relatively narrow G and D peaks located at 1355 and 1580 cm −1 respectively, correspond to the graphite/graphene-like packing of atoms with a laminar structure [ 46 , 71 , 73 , 74 , 75 ]. The incorporation of S atoms into the graphene structure may not cause noticeable changes in the Raman spectrum of graphene [ 76 ].…”

Section: Discussionmentioning

confidence: 99%

Specific Features of Reactive Pulsed Laser Deposition of Solid Lubricating Nanocomposite Mo–S–C–H Thin-Film Coatings

Fominski

Романов

et al. 2020

Nanomaterials

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This work investigates the structure and chemical states of thin-film coatings obtained by pulsed laser codeposition of Mo and C in a reactive gas (H2S). The coatings were analysed for their prospective use as solid lubricating coatings for friction units operating in extreme conditions. Pulsed laser ablation of molybdenum and graphite targets was accompanied by the effective interaction of the deposited Mo and C layers with the reactive gas and the chemical states of Mo- and C-containing nanophases were interdependent. This had a negative effect on the tribological properties of Mo–S–C–H nanocomposite coatings obtained at H2S pressures of 9 and 18 Pa, which were optimal for obtaining MoS2 and MoS3 coatings, respectively. The best tribological properties were found for the Mo–S–C–H_5.5 coating formed at an H2S pressure of 5.5 Pa. At this pressure, the x = S/Mo ratio in the MoSx nanophase was slightly less than 2, and the a-C(S,H) nanophase contained ~8 at.% S and ~16 at.% H. The a-C(S,H) nanophase with this composition provided a low coefficient of friction (~0.03) at low ambient humidity and 22 °C. The nanophase composition in Mo–S–C–H_5.5 coating demonstrated fairly good antifriction properties and increased wear resistance even at −100 °C. For wet friction conditions, Mo–S–C–H nanocomposite coatings did not have significant advantages in reducing friction compared to the MoS2 and MoS3 coatings formed by reactive pulsed laser deposition.

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Modification of a-C:H films via nitrogen and silicon doping: The way to the superlubricity in moisture atmosphere

Cited by 36 publications

References 38 publications

Effect of nitrogen in the properties of diamond-like carbon (DLC) coating on Ti₆Al₄V substrate

Effect of nitrogen in the properties of diamond-like carbon (DLC) coating on Ti₆Al₄V substrate

Achieving ultra‐low friction of a‐C:H film grown on 9Cr18Mo steel for industrial application via programmable high power pulse magnetron sputtering

Specific Features of Reactive Pulsed Laser Deposition of Solid Lubricating Nanocomposite Mo–S–C–H Thin-Film Coatings

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Modification of a-C:H films via nitrogen and silicon doping: The way to the superlubricity in moisture atmosphere

Cited by 36 publications

References 38 publications

Effect of nitrogen in the properties of diamond-like carbon (DLC) coating on Ti6Al4V substrate

Effect of nitrogen in the properties of diamond-like carbon (DLC) coating on Ti6Al4V substrate

Achieving ultra‐low friction of a‐C:H film grown on 9Cr18Mo steel for industrial application via programmable high power pulse magnetron sputtering

Specific Features of Reactive Pulsed Laser Deposition of Solid Lubricating Nanocomposite Mo–S–C–H Thin-Film Coatings

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Effect of nitrogen in the properties of diamond-like carbon (DLC) coating on Ti₆Al₄V substrate

Effect of nitrogen in the properties of diamond-like carbon (DLC) coating on Ti₆Al₄V substrate