Modern Focused-Ion-Beam-Based Site-Specific Specimen Preparation for Atom Probe Tomography

Prosa, Ty J.; Larson, David J.

doi:10.1017/s1431927616012642

Cited by 87 publications

(53 citation statements)

References 98 publications

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“…In recent years, site‐specific sample preparation of both conductive and non‐conductive materials has increasingly utilised FIB‐SEM (Waugh et al , Alexander et al , Larson et al ), and a number of methods for FIB‐based specimen preparation have been developed (e.g., see reviews by Miller et al , McKenzie et al , Blum et al , Prosa and Larson ). However, most facilities now use a similar methodology for site‐specific atom probe specimens (Figure ).…”

Section: Sample Selection and Preparationmentioning

confidence: 99%

Atom Probe Tomography: Development and Application to the Geosciences

Reddy

Saxey

Rickard

et al. 2020

Geostandard Geoanalytic Res

100

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Atom probe tomography (APT) is an analytical technique that provides quantitative three‐dimensional elemental and isotopic analyses at sub‐nanometre resolution across the whole periodic table. Although developed and mostly used in the materials science and semiconductor fields, recent years have seen increasing development and application in the geoscience and planetary science disciplines. Atom probe studies demonstrate compositional complexity at the nanoscale and provide fundamental new insights into the atom‐scale mechanisms taking place in minerals over geological time. Here, we provide an overview of APT, including the historical development and technical aspects of the instrumentation, and the fundamentals of data acquisition, data processing and data reconstruction. We also review previous studies and highlight the potential future applications of nanoscale geochemical studies of natural materials.

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Section: Sample Selection and Preparationmentioning

confidence: 99%

Atom Probe Tomography: Development and Application to the Geosciences

Reddy

Saxey

Rickard

et al. 2020

Geostandard Geoanalytic Res

100

View full text Add to dashboard Cite

show abstract

“…2-14kV. In this regard, two of the most commonly employed methods for preparation of organic samples for APT specimens [7][8][9][10] are: (1) electrochemical polishing of a metal wire with the desired shape and dimensions used as a substrate for depositing a thin layer of the actual organic material of interest; (2) site-specific or bulk lift-out and shaping by means of a focused ion beam (FIB), usually in a dual beam configuration within a scanning electron microscope (FIB-SEM).…”

Section: Introductionmentioning

confidence: 99%

Cryo-focused ion beam preparation of perovskite based solar cells for atom probe tomography

et al. 2020

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Focused-ion beam lift-out and annular milling is the most common method used for obtaining site specific specimens for atom probe tomography (APT) experiments and transmission electron microscopy. However, one of the main limitations of this technique comes from the structural damage as well as chemical degradation caused by the beam of high-energy ions. These aspects are especially critical in highly-sensitive specimens. In this regard, ion beam milling under cryogenic conditions has been an established technique for damage mitigation. Here, we implement a cryo-focused ion beam approach to prepare specimens for APT measurements from a quadruple cation perovskite-based solar cell device with 19.7% efficiency. As opposed to room temperature FIB milling we found that cryo-milling considerably improved APT results in terms of yield and composition measurement, i.e. halide loss, both related to less defects within the APT specimen. Based on our approach we discuss the prospects of reliable atom probe measurements of perovskite based solar cell materials. An insight into the field evaporation behavior of the organic-inorganic molecules that compose the perovskite material is also given with the aim of expanding the applicability of APT experiments towards nano-characterization of complex organo-metal materials.

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“…It has become one of the most important micro/nano manufacturing tools for its direct patterning, high resolution and its multi-role in the semiconductor field [5,6]. It can be used for transmission electron microscopy (TEM) sample preparation [7][8][9][10], direct and mask-less 3-D patterning [11][12][13], semiconductor integrated circuit failure analysis [14,15], and solid oxide cell (SOC) fabrication [16]. Theories on ion-solid interaction and the relative simulation methods have developed rapidly along with the expansion of FIB application.…”

Section: Introductionmentioning

confidence: 99%

3-D SRIM Simulation of Focused Ion Beam Sputtering with an Application-Oriented Incident Beam Model

et al. 2019

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Ion beam sputter etching has been widely used in material surface modification and transmission electron microscope (TEM) sample preparation. Due to the complexity of the ion beam etching process, the quantitative simulation of ion beam sputtering is necessary to guarantee precision in surface treatment and sculpting under different energies and beam currents. In this paper, an application-oriented incident ion beam model was first built with aberrations and Coulomb repulsion forces being considered from the Ga ion source to the sample. The sputtering process of this model on the sample was then analyzed and simulated with an improved stopping and range of ions in matter (SRIM) program. The sputtering performance of this model, the point-like incident beam and the typical Gaussian incident beam was given in the end. Results show that the penetration depth of Ga ions having 30 keV energy in silicon is 28 nm and the radial range is 29.6 nm with 50 pA beam current. The application-oriented model has been verified by our focused ion beam-scanning electron microscopy (FIB-SEM) milling experiment and it will be a potential thermal source in simulating the process of FIB bombarding organic samples.

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Modern Focused-Ion-Beam-Based Site-Specific Specimen Preparation for Atom Probe Tomography

Cited by 87 publications

References 98 publications

Atom Probe Tomography: Development and Application to the Geosciences

Atom Probe Tomography: Development and Application to the Geosciences

Cryo-focused ion beam preparation of perovskite based solar cells for atom probe tomography

3-D SRIM Simulation of Focused Ion Beam Sputtering with an Application-Oriented Incident Beam Model

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