1999
DOI: 10.1088/0022-3727/32/6/015
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Modelling the discharge region of a microwave generated hydrogen plasma

Abstract: A zero-dimensional steady-state model of low-pressure (2-60 Torr) microwave-generated hydrogen plasmas was developed. The electron energy distribution function (EEDF) was determined using the Boltzmann equation, coupled to species, energy and power balances. The EEDF from the Boltzmann equation permitted computation of the rate constants and average electron temperature required for simultaneous solution to the six species balances, two for neutrals (H, H 2 ) and four for charged (H + , H + 2 , H + 3 and elect… Show more

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Cited by 53 publications
(74 citation statements)
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“…This phenomenon is not observed in discharges of pure noble gases [3,5,10,[31][32][33]. In the case of the production of fast H, the intensity may be low due to efficient collisional energy exchange with molecular hydrogen with dissociative excitation [34]. In a glow discharge, fast H is formed and excited predominantly near the electrode surfaces.…”
Section: Discussionmentioning
confidence: 98%
“…This phenomenon is not observed in discharges of pure noble gases [3,5,10,[31][32][33]. In the case of the production of fast H, the intensity may be low due to efficient collisional energy exchange with molecular hydrogen with dissociative excitation [34]. In a glow discharge, fast H is formed and excited predominantly near the electrode surfaces.…”
Section: Discussionmentioning
confidence: 98%
“…Bolsig software (Wei et al, 2000;Chen et al, 1999) can find the electron energy distribution function (EEDF) and the energy consumption of unit electrons at different types of collision reactions, as well as the collision frequency at different E/N values.…”
Section: Charged Species Modelmentioning
confidence: 99%
“…Given the rapid cooling this suggests the aerosol particles encounter temperatures greater than 4000 C in the 'hot zone'. Even the best ovens are perhaps able to reach 2500 C. Second, in the microwave plasma there are actually two temperatures, that of the neutral species discussed above, and that of the charged species, which in this system has been measured to be as high as 80,000 C. As discussed elsewhere, these two 'systems' co-exist in the same space, and exchange energy through 'generation terms' [17,18]. Clearly the plasma found in the microwave system is far from equilibrium.…”
Section: Resultsmentioning
confidence: 84%