1995
DOI: 10.1016/0925-9635(94)00241-x
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Modelling of self-limiting laser ablation of rough surfaces: application to the polishing of diamond films

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Cited by 56 publications
(17 citation statements)
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“…In the ion-beam machining methods, the diamond film is removed using ion sources from sputtering [10]. In the laser machining method, the diamond film is evaporated using a laser beam [11,12]. Laser and ion-beam machining methods are non-contact methods that may be used to finish curved surfaces.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…In the ion-beam machining methods, the diamond film is removed using ion sources from sputtering [10]. In the laser machining method, the diamond film is evaporated using a laser beam [11,12]. Laser and ion-beam machining methods are non-contact methods that may be used to finish curved surfaces.…”
Section: Introductionmentioning
confidence: 99%
“…However, the surface roughness of a diamond film coated by the chemical vapor deposition (CVD) process increases with increasing film thickness, and its maximum value can achieve several microns [2]. Hence, the surface roughness must be decreased to meet the actual requirement from sub-microns to nanometers, but the surface machining process is time consuming and expensive [3][4][5][6][7][8][9][10][11][12].…”
Section: Introductionmentioning
confidence: 99%
“…For high precision manufacturing on rotational workpieces, a quasi-tangential process is favorable to hold tight tolerances with superb surface quality [6]. The principal idea of grazing-incidence laser ablation makes a self-limiting laser ablation process possible [7]. This enables smoothing of a prior rough surface under oblique irradiation with θ i >75 • .…”
Section: Introductionmentioning
confidence: 99%
“…mond polishing [19]. The laser is steered under oblique incidence θ i >75 deg over the surface with a energy density slightly above the threshold.…”
Section: Introductionmentioning
confidence: 99%