Modelling of resolution enhancement processes in lithography

Arshak, K.; McDonagh, D.; Arshak, A.; Mathur, B.P.

doi:10.1109/icmel.1995.500886

Cited by 2 publications

(4 citation statements)

References 16 publications

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“…32 When a redox analyte is absent, such a change of the IL/electrode interface will cause a fluctuation of the baseline signal that results in baseline signal drift through time. 46 Due to the hysteresis effects of the potential polarization 26,47,48 the change of the IL/electrode interface, under potential polarization, will not only vary the interfacial capacitance but also lead to difficulties in surface adsorption of the analyte gas molecules. 32 For an electrochemical sensor, the sensing signal is proportional to the concentration of the analyte at the electrode/electrolyte interface.…”

Section: Resultsmentioning

confidence: 99%

Characterization of the Ionic Liquid/Electrode Interfacial Relaxation Processes Under Potential Polarization for Ionic Liquid Amperometric Gas Sensor Method Development

Lü¹,

Zhao²,

Mason

et al. 2018

ACS Sens.

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Electrochemical amperometric sensors require a constant or varying potential at the working electrode that drives redox reactions of the analyte for detection. The interfacial redox reaction(s) can result in the formation of new chemical products that could change the initial condition of the electrode/electrolyte interface. If the products are not inert and/or cannot be removed from the system such that the initial condition of the electrode/electrolyte interface cannot be restored, the sensor signal baseline would consequently drift, which is problematic for the continuous and real-time sensors. By setting the electrode potential with the periodical ON-OFF mode, electrolysis can be forestalled during the off mode which can minimize the sensor signal baseline drift and reduce the power consumption of the sensor. However, it is known that the relaxation of the structure in the electrical double layer at the ionic liquid/electrode interface to the steps of the electrode potential is slow. This work characterized the electrode/electrolyte interfacial relaxation process of an ionic liquid based electrochemical gas (IL-EG) sensor by performing multiple potential step experiments in which the potential is stepped from an open circuit potential (OCP) to the amperometric sensing potential at various frequencies with different time periods. Our results showed that by shortening the sensing period as well as extending the idle period (i.e., enlarge the ratio of idle period versus sensing period) of the potential step experiments, the electrode/electrolyte interface is prone to relax to its original state, and thus reduces the baseline drift. Additionally, the high viscosity of the ionic liquids is beneficial for electrochemical regeneration via the implementation of a conditioning step at zero volts at the electrode/electrolyte. By setting the working electrode at zero volts instead of OCP, our results showed that it could further minimize the baseline drift, enhance the sensing signal stability, and extend the functioning lifetime of a continuous IL-EG oxygen sensor.

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Section: Resultsmentioning

confidence: 99%

Characterization of the Ionic Liquid/Electrode Interfacial Relaxation Processes Under Potential Polarization for Ionic Liquid Amperometric Gas Sensor Method Development

Lü¹,

Zhao²,

Mason

et al. 2018

ACS Sens.

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“…Gases, such as hydrogen, enter the sensor array and interact with the metal, changing the electric field inside the device to produce a signal that is electronically recorded. 91 The SpiroNose sensor, which was designed for medical testing, contains five metal-oxide semiconductor sensor arrays, two of which are used as reference arrays to analyze ambient VOCs and three to detect VOCs in breath samples. 92 Other sensors can be used to develop e-nose devices, such as conducting polymers, polymer composites, acoustic waves, optical fiber arrays, electrochemical gas (EC), and colorimetric sensor arrays.…”

Section: Electronic Nosementioning

confidence: 99%

“…Surface acoustic wave sensors are usually developed using piezoelectric substrate materials such as ZnO, lithium niobate or quartz with transmitting and receiving transducers on either side. 91 The surface acoustic wave sensor has been utilized in an e-nose to compare volatile profiles of lung cancer patients with controls. 83 Optical fibers coated in fluorescent dye have been utilized as sensors, in which wavelength changes, intensity alterations, and spectrum changes are tracked as indicators of interaction with a gas or vapor.…”

Section: Electronic Nosementioning

confidence: 99%

“…83 Optical fibers coated in fluorescent dye have been utilized as sensors, in which wavelength changes, intensity alterations, and spectrum changes are tracked as indicators of interaction with a gas or vapor. 91 Metalloporphyrin dye dots have been printed on paper sensor cartridges to mcreate colorimetric sensor arrays, and pattern changes in the dye colors as a result of interactions with the chemicals in the breath samples have been captured by photographs. 93 In EC sensors, volatiles are detected after electrochemical oxidation or reduction at the electrode surface, making these sensors selective for a small number of reactive gases.…”

Section: Electronic Nosementioning

confidence: 99%

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Evolution of clinical and environmental health applications of exhaled breath research: Review of methods and instrumentation for gas-phase, condensate, and aerosols

Wallace

Pleil

2018

Analytica Chimica Acta

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Human breath, along with urine and blood, has long been one of the three major biological media for assessing human health and environmental exposure. In fact, the detection of odor on human breath, as described by Hippocrates in 400 BC, is considered the first analytical health assessment tool. Although less common in comparison to contemporary bio-fluids analyses, breath has become an attractive diagnostic medium as sampling is non-invasive, unlimited in timing and volume, and does not require clinical personnel. Exhaled breath, exhaled breath condensate (EBC), and exhaled breath aerosol (EBA) are different types of breath matrices used to assess human health and disease state. Over the past 20 years, breath research has made many advances in assessing health state, overcoming many of its initial challenges related to sampling and analysis. The wide variety of sampling techniques and collection devices that have been developed for these media are discussed herein. The different types of sensors and mass spectrometry instruments currently available for breath analysis are evaluated as well as emerging breath research topics, such as cytokines, security and airport surveillance, cellular respiration, and canine olfaction.

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Modelling of resolution enhancement processes in lithography

Abstract: The effect of the aerial image on the silylation profile for the top imaging processes, DESIRE and PRIME, is also presented. The effect of the first etch step on the final resist profiles is examined. The partial pressure and the presence of magnetic fields are also presented.

Cited by 2 publications

References 16 publications

Characterization of the Ionic Liquid/Electrode Interfacial Relaxation Processes Under Potential Polarization for Ionic Liquid Amperometric Gas Sensor Method Development

Characterization of the Ionic Liquid/Electrode Interfacial Relaxation Processes Under Potential Polarization for Ionic Liquid Amperometric Gas Sensor Method Development

Evolution of clinical and environmental health applications of exhaled breath research: Review of methods and instrumentation for gas-phase, condensate, and aerosols

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