Modelling and experimental study of machined depth in AFM-based milling of nanochannels

Geng, Yanquan; Ya, Yan; Xing, Yangming; Zhao, Xuesen; Hu, Zhenjiang

doi:10.1016/j.ijmachtools.2013.07.001

Cited by 55 publications

(33 citation statements)

References 24 publications

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“…Generally, the normal load is considered as the product of the sample yield stress and the horizontal projected area of the tip-sample interface [14][15][16]28]. Based on the horizontal projected area in Fig.…”

Section: The Indentation Testmentioning

confidence: 99%

“…In the Geng"s model [16], the normal force is the product of the horizontal projected area of the tip-sample interface and the yield stress, where the horizontal projected area is approximately a quadratic polynomial of the scratching depth, the yield stress is also related to the scratching depth, so a cubic polynomial is much closer to the model"s equation power. Thus, in order to avoid the complicated theoretical modeling, a cubic polynomial is selected to fit the experimental normal load and scratching depth, the range of scratching depth is from 40 nm to 140 nm, the fitting function is optimized as Eq.…”

Section: Scratching Feedmentioning

confidence: 99%

“…Wang studied the relationship between the initial and final nanochannel depth through both theoretically and experimentally [14,15]. Geng modeled the scratching depth theoretically in both single and multiple scratching, and micro/nano structures were manufactured based on the proposed model [16]. Lin estimated the cutting depth based on regression equations of nanoscale contact pressure factor and specific down force energy, respectively [17].…”

Section: Introductionmentioning

confidence: 99%

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Experimental investigation of the tip based micro/nano machining

Guo

Tian

Liu

et al. 2017

Applied Surface Science

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Based on the self-developed three dimensional micro/nano machining system, the effects of machining parameters and sample material on micro/nano machining are investigated. The micro/nano machining system is mainly composed of the probe system and micro/nano positioning stage. The former is applied to control the normal load and the latter is utilized to realize high precision motion in the xy plane. A sample examination method is firstly introduced to estimate whether the sample is placed horizontally. The machining parameters include scratching direction, speed, cycles, normal load and feed. According to the experimental results, the scratching depth is significantly affected by the normal load in all four defined scratching directions but is rarely influenced by the scratching speed. The increase of scratching cycle number can increase the scratching depth as well as smooth the groove wall. In addition, the scratching tests of silicon and copper attest that the harder material is easier to be removed. In the scratching with different feed amount, the machining results indicate that the machined depth increases as the feed reduces. Further, a cubic polynomial is used to fit the experimental results to predict the scratching depth. With the selected machining parameters of scratching direction d3/d4, scratching speed 5μm/s and feed 0.06μm, some more micro structures including stair, sinusoidal groove, Chinese character "田", "TJU" and Chinese panda have been fabricated on the silicon substrate.

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Section: The Indentation Testmentioning

confidence: 99%

Section: Scratching Feedmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Experimental investigation of the tip based micro/nano machining

Guo

Tian

Liu

et al. 2017

Applied Surface Science

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“…Moreover, it remains impossible for the developed micro-milling techniques to create hierarchical surfaces featuring superimposed secondary nanostructures on the basic curved walls of micro-channels. To decrease the feature dimensions, atomic force microscope (AFM) based nano-milling with controlled normal cutting force was developed to generate channels in the nanoscale, which can achieve sub-100 nm lateral resolution and sub-10 nm vertical resolution [16][17][18]. In general, it employs a sharp AFM tip on a flexible cantilever to fabricate nanoscale features at the expense of relatively low e ciency, low accuracy, and high tip wear rate, significantly restricting its application for high throughput requirements [16].…”

Section: Accepted Manuscriptmentioning

confidence: 99%

Modulated diamond cutting for the generation of complicated micro/nanofluidic channels

Zhu

Tong

et al. 2019

Precision Engineering

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A novel modulated diamond cutting (MDC) technique is proposed for the generation of complicated micro/nanofluidic channels. The MDC adopts a turning configuration through a four-axis ultra-precision diamond lathe, a motion modulation based milling operation is introduced by extending the virtual spindle technique. This unique principle makes the MDC more suitable to generate micro/nanofluidic channels through compromising certain inherent advantages of both diamond turning and milling. Moreover, taking advantage of axial servo motion modulation as well as tool mark modulation using the re-cutting e↵ect, complicated channels can be e↵ectively generated having spatially-varying shapes as well as hierarchical micro/nanostructures. Through both numerical simulation and experimental cutting, capability and outperformance of the MDC are demonstrated well. The result suggests that the MDC is capable to generate ultra-smooth channel surfaces with complicated shapes and superimposed surface nanostructures, exhibiting significant superiority for the generation of micro/nanofluidic channels with high flexibility, high e ciency, and high universality.

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“…According to the tip geometry, they can be mainly categorized into spherical tips [8][9][10], conical tips [11,12] and pyramidal tips [13][14][15]. The spherical tip is usually with a diameter in the micron scale, which is not appropriate for the nanochannel fabrication.…”

Section: Introductionmentioning

confidence: 99%

Modeling and simulation of the probe tip based nanochannel scratching

Guo

Tian

Liu

et al. 2017

Precision Engineering

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Copies of full items can be used for personal research or study, educational, or not-for-profit purposes without prior permission or charge. Provided that the authors, title and full bibliographic details are credited, a hyperlink and/or URL is given for the original metadata page and the content is not changed in any way. A note on versions:The version presented here may differ from the published version or, version of record, if you wish to cite this item you are advised to consult the publisher's version. Please see the 'permanent WRAP URL' above for details on accessing the published version and note that access may require a subscription. AbstractThis paper presents the theoretical modeling and numerical simulation of the probe tip based nanochannel scratching. According to the scratching depth, the probe tip is modeled as a spherical capped conical tip or a spherical capped regular three side pyramid tip to calculate the normal force needed for the nanochannel scratching.In order to further investigate the impact of scratching speed, scratching depth and scratching direction on the scratching process, the scratching simulation is implemented in LS-DYNA software, and a mesh-less method called smooth particle hydrodynamics (SPH) is used for the sample construction. Based on the theoretical and simulated analyses, the increase of the scratching speed, the scratching depth and the face angle will result in an increase in the normal force. At the same scratching depth, the normal forces of the spherical capped regular three side pyramid tip model are different in different scratching directions, which are in agreement with the theoretical calculations in the d 3 and d 4 directions. Moreover, the errors between the theoretical and simulated normal forces increase as the face angle increases.

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Modelling and experimental study of machined depth in AFM-based milling of nanochannels

Cited by 55 publications

References 24 publications

Experimental investigation of the tip based micro/nano machining

Experimental investigation of the tip based micro/nano machining

Modulated diamond cutting for the generation of complicated micro/nanofluidic channels

Modeling and simulation of the probe tip based nanochannel scratching

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