2019 IEEE Conference on Control Technology and Applications (CCTA) 2019
DOI: 10.1109/ccta.2019.8920638
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Modelling and Contouring Error Bounded Control of a Biaxial Industrial Gantry Machine

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Cited by 2 publications
(1 citation statement)
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“…H-type air floating motion platform can realize two degrees of freedom large stroke precise positioning motion and is widely applied in lithography silicon wafer stage, precision measuring equipment, and laser drilling equipment [ 1 , 2 , 3 ]. The platform is directly driven by the linear motor and supported and guided by the air floating guideway, which has the advantages of symmetrical structure and large overall stiffness.…”
Section: Introductionmentioning
confidence: 99%
“…H-type air floating motion platform can realize two degrees of freedom large stroke precise positioning motion and is widely applied in lithography silicon wafer stage, precision measuring equipment, and laser drilling equipment [ 1 , 2 , 3 ]. The platform is directly driven by the linear motor and supported and guided by the air floating guideway, which has the advantages of symmetrical structure and large overall stiffness.…”
Section: Introductionmentioning
confidence: 99%