Modelling and analysis of a magnetic microactuator

Bhailı́s, D de; Murray, Christopher P.; Duffy, Michael C.; Alderman, J.; Kelly, Ger; Mathúna, S. Cian Ó

doi:10.1016/s0924-4247(99)00176-4

Cited by 42 publications

(22 citation statements)

References 2 publications

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“…This geometry allows the membrane to be as flexible as possible, although a moderately sized magnetic disk will be required in order to produce sufficient force to deflect the membrane. The proposed device shares similarities with the mechanical aspects of an actuator described by de Bhailís et al 6 We consider a 1.5-m-thick polymer film with a radius of 100 m and with a 2-m-thick magnetic disk of 3 m radius. A 15-turn electromagnet of radius 5 m is positioned 2.5 m from the center of the membrane.…”

Section: A Scaled Optimized Optical Phase Modulatormentioning

confidence: 95%

Magnetically actuated optical phase modulator

2005

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Abstract.A magnetically actuated optical phase modulator is described. The phase of a reflected optical beam is modulated by deflecting a Mylar® membrane, coated with a magnetic iron/nickel film, with the field of an electromagnet. A phase change of for light of wavelength 0.633 m was achieved with a driving voltage of only 4 V, much smaller than the voltage required for comparable, electrostaticallyactuated devices. The modulator can be scaled to micron dimensions for fabrication in arrays, scaled for even lower drive voltage, and operated at megahertz frequencies.

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Section: A Scaled Optimized Optical Phase Modulatormentioning

confidence: 95%

Magnetically actuated optical phase modulator

2005

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“…Being the actuation force and power the more challenging taxel constrains, the restoring force and the deflection of the membrane can be then tuned to a desired value by choosing the diameter, thickness and elastic properties of the elastomer [18].…”

Section: Magnetic System Modelingmentioning

confidence: 99%

“…Analytical models to optimize the performance of coils or magnets for magnetic actuators with no presence of ferromagnetic materials are available in literature [5,[17][18][19]. If the actuator does include a ferromagnetic material, the optimization could be better performed by using iterative algorithms like genetic algorithms [20,21].…”

Section: Introductionmentioning

confidence: 99%

Optimization of the force and power consumption of a microfabricated magnetic actuator

Zárate

Tosolini

Petroni

et al. 2015

Sensors and Actuators A: Physical

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a b s t r a c tThe force (F) and the power consumption (P) of a magnetic actuator are modeled, measured and optimized in the context of developing micro-actuators for large arrays, such as in portable tactile displays for the visually impaired. We present a novel analytical approach complemented with finite element simulation (FEM) and experiment validation, showing that the optimization process can be performed considering a single figure of merit F/ √ P. The magnetic actuator is a disc-shaped permanent magnet displaced by planar microcoil. Numerous design parameters are evaluated, including the width and separation of the coil traces, the trace thickness, number of turns and the maximum and minimum radius of the coil. We obtained experimental values of F/ √ P ranging from 2 to 12 mN/ √ W using up to 2-layer coils of both microfabricated and commercial printed circuit board (PCB) technologies. This performance can be further improved by a factor of two by adopting a 6-layer technology. The method can be applied to a wide range of electromagnetic actuators.

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“…Both new magnetic materials and technology for microcoil are studied for improving generation of high magnetic fields. In the later case, planar microcoils are extensively used for actuation of relays [1], membranes for pump or valve [2,3] or flexible beams [4]. In addition to long range and high density energy, other advantages of magnetic actuation are the facility to process arrays of microcoils [5,6] and to improve the magnetic field by mutuality of several coils.…”

Section: Introductionmentioning

confidence: 99%

Copper planar microcoils applied to magnetic actuation

et al. 2007

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Recent advances in microtechnology allow realization of planar microcoils. These components are integrated in MEMS as magnetic sensor or actuator. In the latter case, it is necessary to maximize the effective magnetic field which is proportional to the current passing through the copper track and depends on the distance to the generation microcoil. The aim of this work was to determine the optimal microcoil design configuration for magnetic field generation. The results were applied to magnetic actuation, taking into account technological constraints. In particular, we have considered different realistic configurations that involve a magnetically actuated device coupled to a microcoil. Calculations by a semianalytical method using Matlab software were validated by experimental measurements. The copper planar microcoils are fabricated by U.V. micromoulding on different substrates: flexible polymer (Kapton®) and silicate on silicon. They are constituted by a spiral-like continuous track. Their total surface is about 1 mm 2 .

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Modelling and analysis of a magnetic microactuator

Cited by 42 publications

References 2 publications

Magnetically actuated optical phase modulator

Magnetically actuated optical phase modulator

Optimization of the force and power consumption of a microfabricated magnetic actuator

Copper planar microcoils applied to magnetic actuation

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