Modelling and Analysis of a Type of Capacitance Based Accelerometer

Abstract

In this paper, a capacitance based accelerometer is studied. The sensitivity, frequency response, mask layout and finally fabrication process are presented. For the sensitivity of the selected accelerometer, the relative change of capacitance of the selected accelerometer with respect to acceleration a is derived, the frequency response of the accelerometer is investigated, and the value of which is estimated under the specified parameters provided; finally the accelerometer is displayed and it is fabricated by using several steps of deposition, patterning and etching.