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2022
DOI: 10.1016/j.sna.2022.113661
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Modelling analysis for design of microshutters with new electrode configuration

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“…Together these improvements permit purely electrostatic actuation, greatly decreases the time to open/close or address selected shutters from several seconds to a fraction of a second. 8,9 These devices do not require cryogenic compatibility, as they are intended for use in ultraviolet, visible and near IR applications, alleviating the need to account for thermal extremes in the fabrication process.…”
Section: Introductionmentioning
confidence: 99%
“…Together these improvements permit purely electrostatic actuation, greatly decreases the time to open/close or address selected shutters from several seconds to a fraction of a second. 8,9 These devices do not require cryogenic compatibility, as they are intended for use in ultraviolet, visible and near IR applications, alleviating the need to account for thermal extremes in the fabrication process.…”
Section: Introductionmentioning
confidence: 99%