Modeling the pull-in parameters of electrostatic actuators with a novel lumped two degrees of freedom pull-in model

2007

In this work, we investigate the combined influence of electromagnetic and acoustic Casimir forces on the pull-in voltage of microswitches with self-affine rough plates. It is shown that for plate separations within the micron range the acoustic term arising from pressure fluctuations can influence significantly the pull-in potential in a manner that depends on the particular roughness characteristics. Indeed, the acoustic term contribution can be comparable to that of surface roughness. Moreover, the temperature influence from the acoustic term appears to play a significant role besides that arising from the temperature dependence of the electromagnetic force due to quantum vacuum fluctuations.

Section: ͑3͒mentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Pull-in voltage of microswitch rough plates in the presence of electromagnetic and acoustic Casimir forces

2007

“…[1][2][3][4][5][6][7][8][9][10][11][12][13][14] A typical microswitch is constructed from two conducting electrodes, where one electrode is usually able to move but still remains suspended by a mechanical spring. By applying a voltage difference between the two electrodes, the mobile electrode moves towards the ground electrode due to the electrostatic force.…”

Section: Introductionmentioning

confidence: 99%

“…However, at a certain voltage the mobile electrode becomes unstable and collapses or pulls in onto the fixed ground electrode. 3,4 Besides, pull-in instabilities problems, residual plate stress, and fringing fields influence the operation and failure of microswitches and should be carefully taken into consideration. 5,6 Furthermore, when the proximity between the plates of switches becomes of the order of nanometers up to a few microns, a regime is entered where forces that are quantum mechanical in nature, namely, van der Waals ͑vdW͒ and Casimir forces, become operative.…”

Section: Introductionmentioning

confidence: 99%

Contact angle influence on the pull-in voltage of microswitches in the presence of capillary and quantum vacuum effects

2007

Capillary condensation between the electrodes of microswitches influences the effective pull-in voltage in a manner that depends on the contact angle of the capillary meniscus and the presence of plate surface roughness. Indeed, surface roughening is shown to have a stronger influence on the pull-in potential for relatively small contact angles with respect to that of a flat surface when capillary condensation takes place. For long wavelength roughness ratios w / Ӷ 1 with w the rms roughness amplitude and the in-plane correlation length, the pull-in voltage increases with increasing theoretical contact angle 0 for flat surfaces. With decreasing correlation length ͑increasing roughness͒, the pull-in potential decreases faster for smaller contact angles 0 In addition, with decreasing roughness exponent H ͑0 Ͻ H Ͻ 1͒, which characterizes short wavelength roughness fluctuation at short length scales ͑Ͻ ͒, the pull-in potential shows a steeper decrease with decreasing correlation length . Finally, with increasing relative humidity, the sensitivity of the pull-in voltage at small correlation lengths attenuates significantly with increasing contact angle 0 .

“…[1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16] A typical switch is constructed from two conducting electrodes. One electrode is usually fixed, and the other one is able to move but it remains suspended by a mechanical spring.…”

Section: Introductionmentioning

confidence: 99%

Capillary condensation and quantum vacuum effects on the pull-in voltage of electrostatic switches with self-affine rough plates

2006

Link to publication in University of Groningen/UMCG research database Citation for published version (APA): Palasantzas, G. (2006). Capillary condensation and quantum vacuum effects on the pull-in voltage of electrostatic switches with self-affine rough plates. Journal of Applied Physics, 100(5), art. -054503.[054503]. DOI: 10.1063/1.2229937 Copyright Other than for strictly personal use, it is not permitted to download or to forward/distribute the text or part of it without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license (like Creative Commons).Take-down policy If you believe that this document breaches copyright please contact us providing details, and we will remove access to the work immediately and investigate your claim.Downloaded from the University of Groningen/UMCG research database (Pure): http://www.rug.nl/research/portal. For technical reasons the number of authors shown on this cover page is limited to 10 maximum. In this work, we study the influence of capillary forces in combination with electrostatic and quantum vacuum generated forces on the pull-in voltage of microswitches having self-affine rough surfaces. This type of roughness is described by the rms roughness amplitude w, the in-plane correlation length , and the roughness exponent H that quantifies the degree of surface irregularity at short length scales ͑Ͻ ͒. It is shown that an attractive capillary force decreases more the effective pull-in voltage when the plate surfaces are rougher. The latter corresponds to smaller roughness exponents H and/or larger long wavelength roughness ratios w / . Notably, the capillary contribution increases the sensitivity of the effective pull-in voltage on the roughness exponent H. This behavior takes place for values of H close to its experimental accuracy.