Modeling the hysteresis of a scanning probe microscope

Dirscherl, Kai; Garnæs, Jørgen; Nielsen, L.H.; Jøgensen, Jan Friis; Sørensen, Mads Peter

doi:10.1116/1.591249

“…The results shown in Fig. 1 were mainly obtained Drift-insensitive distributed calibration of probe microscope scanner 6 with the use of the second scenario.…”

Section: Actions Of the Algorithm When The Measurand Goes Out Of The mentioning

confidence: 99%

Drift-insensitive distributed calibration of probe microscope scanner in nanometer range: Real mode

Lapshin

¹

2019

Applied Surface Science

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A method is described intended for distributed calibration of a probe microscope scanner consisting in a search for a net of local calibration coefficients (LCCs) in the process of automatic measurement of a standard surface, whereby each point of the movement space of the scanner can be defined by a unique set of scale factors. Featureoriented scanning (FOS) methodology is used to implement the distributed calibration, which permits to exclude in situ the negative influence of thermal drift, creep and hysteresis on the obtained results. The sensitivity of LCCs to errors in determination of position coordinates of surface features forming the local calibration structure (LCS) is eliminated by performing multiple repeated measurements followed by building regression surfaces. There are no principle restrictions on the number of repeated LCS measurements. Possessing the calibration database enables correcting in one procedure all the spatial distortions caused by nonlinearity, nonorthogonality and spurious crosstalk couplings of the microscope scanner piezomanipulators. To provide high precision of spatial measurements in nanometer range, the calibration is carried out using natural standards -constants of crystal lattice. The method allows for automatic characterization of crystal surfaces. The method may be used with any kind of scanning probe microscope (SPM).

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“…This leaves us with the second source of deviation - scanner nonlinearities such as hysteresis - whose contribution is nontrivial due to the physical properties of piezoelectric materials. Nevertheless, models have been developed in order to study this hysteresis, allowing for a precise description of the relative displacement error as a function of position, yielding an effective position x t/r as a function of the control voltage V that can be expressed as 13 . The t and r branches of the equation describe the trace and retrace behaviour respectively, and α , b , u are constants.…”

Section: Distortion Correction Algorithmmentioning

confidence: 99%

Computer vision distortion correction of scanning probe microscopy images

Gaponenko

¹

,

Tückmantel

²

,

Ziegler

³

et al. 2017

Sci Rep

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Since its inception, scanning probe microscopy (SPM) has established itself as the tool of choice for probing surfaces and functionalities at the nanoscale. Although recent developments in the instrumentation have greatly improved the metrological aspects of SPM, it is still plagued by the drifts and nonlinearities of the piezoelectric actuators underlying the precise nanoscale motion. In this work, we present an innovative computer-vision-based distortion correction algorithm for offline processing of functional SPM measurements, allowing two images to be directly overlaid with minimal error – thus correlating position with time evolution and local functionality. To demonstrate its versatility, the algorithm is applied to two very different systems. First, we show the tracking of polarisation switching in an epitaxial Pb(Zr0.2Ti0.8)O3 thin film during high-speed continuous scanning under applied tip bias. Thanks to the precise time-location-polarisation correlation we can extract the regions of domain nucleation and track the motion of domain walls until the merging of the latter in avalanche-like events. Secondly, the morphology of surface folds and wrinkles in graphene deposited on a PET substrate is probed as a function of applied strain, allowing the relaxation of individual wrinkles to be tracked.

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“…Drift-insensitive distributed calibration of probe microscope scanner 6 Actually, while summing up LCCs, the local unit steps corresponding to each trajectory point are summed.…”

Section: Using Lccs For Determination Of the True Scanner Movementsmentioning

confidence: 99%

Drift-insensitive distributed calibration of probe microscope scanner in nanometer range: Approach description

Lapshin

¹

2015

Applied Surface Science

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A method is described intended for distributed calibration of a probe microscope scanner consisting in a search for a net of local calibration coefficients (LCCs) in the process of automatic measurement of a standard surface, whereby each point of the movement space of the scanner can be defined by a unique set of scale factors. Featureoriented scanning (FOS) methodology is used to implement the distributed calibration, which permits to exclude in situ the negative influence of thermal drift, creep and hysteresis on the obtained results. The sensitivity of LCCs to errors in determination of position coordinates of surface features forming the local calibration structure (LCS) is eliminated by performing multiple repeated measurements followed by building regression surfaces. There are no principle restrictions on the number of repeated LCS measurements. Possessing the calibration database enables correcting in one procedure all the spatial distortions caused by nonlinearity, nonorthogonality and spurious crosstalk couplings of the microscope scanner piezomanipulators. To provide high precision of spatial measurements in nanometer range, the calibration is carried out using natural standards -constants of crystal lattice. The method allows for automatic characterization of crystal surfaces. The method may be used with any scanning probe instrument.

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Modeling the hysteresis of a scanning probe microscope

Cited by 28 publications

References 7 publications

Drift-insensitive distributed calibration of probe microscope scanner in nanometer range: Real mode

Drift-insensitive distributed calibration of probe microscope scanner in nanometer range: Real mode

Computer vision distortion correction of scanning probe microscopy images

Drift-insensitive distributed calibration of probe microscope scanner in nanometer range: Approach description

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