2004
DOI: 10.1063/1.1764941
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Modeling the effect of subsurface interface defects on contact stiffness for ultrasonic atomic force microscopy

Abstract: A model was presented for analyzing the sensitivity of atomic force microscopy (AFM) to several types of subsurface interface defects on contact stiffness. It was found that ultrasonic AFM techniques measuring normal contact stiffness should resolve delaminations and voids typically found at the various interfaces of electrical interconnects. The detection depth of ultrasonic AFM was found to be lower for disbonds at subsurface interfaces. The results indicates that the ultrasonic AFM should be suitable for su… Show more

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Cited by 50 publications
(31 citation statements)
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“…Finally, HFM has been employed to detect NPs deeply buried in polymeric matrixes. 29 While the theoretical explanation of the nature of the subsurface contrast, whether it is due to ultrasonic wave scattering or elastic field modification, is still under discussion, 30 recent investigations have confirmed the reproducibility of this experimental observation. 31,32 Based on these premises, we have carried out a study of samples made of two-dimensional (2D) materials, 33 targeting the exploration of subsurface details by means of UFM.…”
Section: Introductionmentioning
confidence: 79%
“…Finally, HFM has been employed to detect NPs deeply buried in polymeric matrixes. 29 While the theoretical explanation of the nature of the subsurface contrast, whether it is due to ultrasonic wave scattering or elastic field modification, is still under discussion, 30 recent investigations have confirmed the reproducibility of this experimental observation. 31,32 Based on these premises, we have carried out a study of samples made of two-dimensional (2D) materials, 33 targeting the exploration of subsurface details by means of UFM.…”
Section: Introductionmentioning
confidence: 79%
“…A-SPM techniques have indisputably demonstrated their capability for imaging subsurface features using ad hoc prepared samples [69,[111][112][113][114]. In particular, A-SPM quantitative measurements of contact stiffness have shown good agreement with theoretical calculations of reduced adhesion at buried interfaces [111,115] and of subsurface voids [112]. Apart from the admittedly amazing results attained on test samples, more theoretical and/or experimental efforts are required for the interpretation of subsurface imaging of real samples.…”
Section: Subsurface Imagingmentioning
confidence: 93%
“…When optimized, this method gives the opportunity to image the defects in coatings in thickness of 100 nm [17] or more. The depth of defect detection depends on the applied force and the probing tip radius of curvature.…”
Section: Introductionmentioning
confidence: 99%