Modeling of the surface roughness of thin TiSi2 films at the point of rupture

Amorsolo, Alberto V.; Funkenbusch, Paul D.; Kadin, Alan M.

doi:10.1016/s0921-5107(98)00321-3

Cited by 2 publications

(3 citation statements)

References 16 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The surface of a columnar grain assumes a spherical-cap shape. As the grain grows, the curvature of the spherical cap increases [19], which accounts for the linear increase of surface roughness with thickness in the initial period of deposition. During the later period of deposition the arriving particles eventually select the grain boundaries as the final destination, thus lowering the curvature of the spherical caps.…”

Section: Discussionmentioning

confidence: 99%

“…Recently, the microstructure and texture of polycrystalline thin films have drawn the attention of many researchers [12][13][14][15][16][17][18][19][20] from the standpoint of predicting the evolution of the microstructure through modeling and experiments. Among the computer modeling studies, molecular dynamics (MD) [16] and Monte-Carlo (MC) methods [13,14,[17][18][19][20] are widely used. The MC method adopts a meso-scale modeling that particularly suits experimental verification.…”

Section: Introductionmentioning

confidence: 99%

“…Helin et al [18], utilizing the MC method, studied the effect of substrate temperature on the formation process of nuclei of islands shape. Amorsolo et al [19] and Santos et al [20] used the MC method in studying the effect of electro-plating time on coating surface roughness. Most of the MC simulations conducted thus far have attempted to predict the formation process of thin films through the diffusion, adsorption, or vapor deposition behavior of ad-atoms or ad-ions arriving at the surface of the substrate.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Three-dimensional Monte-Carlo computer simulation of grain growth in electro-plated pure Ni

Uhm

Hwang

2004

Met. Mater. Int.

View full text Add to dashboard Cite

A Monte-Carlo computer simulation code was developed to study grain growth characteristics during thin film deposition. The simulation algorithm was based on the minimization of the sum of the anisotropic surface energy and grain boundary energy. The average grain size and the surface roughness of the plated layer increased rapidly with the thickness of deposition, but the rate of the increase diminished with large thickness. In the simulation, it was found that the surface energy term dominated over the grain boundary energy term and consequently a strong {111} fiber texture was predicted. To verify the results of the computer simulation, an experiment was conducted to electro-deposit pure Ni on a Cu substrate. The thickness dependence of the microstructure, particularly roughness and grain size, was consistent with the prediction by the simulation. The roughness increased with thickness in the initial period but became saturated in the later period. Increasing the current density during electro-plating or increasing the deposition rate in the computer simulation randomized the texture and refined the grain size, which was attributed to insufficient diffusion at the specimen surface. In the experiment a pronounced {100} texture was found due to hydrogen adsorption. Minimization of hydrogen adsorption by strong agitation or by addition of boric acid decreased the intensity of the {100} texture substantially, confirming the rationale based on the hydrogen adsorption.

show abstract

Section: Discussionmentioning

confidence: 99%