Abstract:In the linear source of a thermal evaporation system, the thickness of the deposited molecules depends on the angular distribution of the emitted molecular flux from the nozzle. According to Knudsen in 1907, for a cylindrical nozzle, the angular distribution of the emitted molecular flux can be expressed in the form of cosn(θ). The actual angular distribution, however, does not precisely match the form of cosn(θ) by Knudsen. Therefore, various theoretical methods have been studied in an effort to express the a… Show more
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