Modeling of MOEMS components using HDL-A

Saadany, Bassam; Khalil, Diaa

doi:10.1109/2944.991408

Cited by 4 publications

(1 citation statement)

References 26 publications

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“…The major approaches include, the space-division optical switch [7][8][9], the wave-guide type optical switch [10][11][12], the silica-based switch [13][14][15], the thermo-optical switch [16][17][18], the acousto-optic routing switch [19][20][21], the optomechanical switch [22][23][24][25][26], the electro-optic switch [27,28], and the free space optical switch [29,30]. While they all offer the benefits associated with optical interconnection, they do exhibit drawbacks and limitations in practical applications.…”

Section: Introductionmentioning

confidence: 99%

Polarization-independent bidirectional 4×4 optical switch in free space

Yang

et al. 2010

Optics & Laser Technology

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Section: Introductionmentioning

confidence: 99%

Polarization-independent bidirectional 4×4 optical switch in free space

Yang

et al. 2010

Optics & Laser Technology

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Efficient Adjoint Sensitivity Analysis Exploiting the FD-BPM

Swillam

Bakr

2007

J. Lightwave Technol.

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Recent trends in optical MEMS for telecommunication applications

Khalil¹

The Fourth Workshop on Photonics and Its Application, 2004.

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Recent progress in the development of the optical Micro-Electro-Mechanical Systems (MEMS) is reviewed with emphasis on their applications in the field of telecommunications. Both the scientific and the industrial aspects of the components are considered. Different structures are reported and, when necessary, briefly explained showing the main difficulties. in its development as well as its state of the art performance. The possibility of industrialization has gained special interest in our discussion Introduction:Micro-Electro-Mechanical Systems (MEMS), are now playing an important role in many domains. Automotive acceleration sensors, Digital Micro-mirror Device (DMD) displays, Gas sensors, Inkjet nozzles, . . .etc are some examples of the successful application of the MEMS technology, already existing in the market. In telecommunication systems, the MEMS technology has also found its place in the RF and optical domains and the last few years have shown more and more interest in optical MEMS [l]. Actually, at the beginning of this century, year 2000, it has been found that the optical MEMS components are representing about,40% of the engineering MEMS applications. The big potential of this domain makes it a very attractive subject from both the academic and industrial points of view. This potential is mainly due to the advantages of the optical MEMS summarized in:1 -Miniaturization: which means the possibility of fabricating optical components with small size, mass, and cost, as. well as the possibility of controlling the dimensions of these components to the level of sub-microns in a component of a length of some mm's.2-Integration: where mechanical, optical, thermal and electronic functions can be integrated on a single substrate, which improves the reliability of the system, reduces the cost and reduces the effort of alignment and matching between the different components. 3-Batch processing / Mass production: where the possibility of producing thousands of the same component generated by the same mask, insures the high yield, improves the product quality, and reduces significantly the component cost. To make use of these advantages, a lot of effort is still needed, as we will see in this work, on both the academic and industrial research sides.Before beginning our trip in the field of optical MEMS, we will first clarify some terminology currently used in this domain. We thus begin by defining the Micro-machining or Microfabrication which indicates the use of microelectronic technology (lithography, patterning, oxidation, etching, ..etc) for the fabrication of components on the micron scale on a chip. In the same direction, the term Microoptics is used to indicate the free space optical components (mirror, lenses ... etc. i.e. unguided propagation) fabricated by the micromachining. On the other side the term Integrated Optics IO is used to indicate guided wave optical components (WG, Directional coupler, ... etc i.e. guided propagation) fabricated by integrated circuits planar technology on a single substrate...

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Modeling of MOEMS components using HDL-A

Cited by 4 publications

References 26 publications

Polarization-independent bidirectional 4×4 optical switch in free space

Polarization-independent bidirectional 4×4 optical switch in free space

Efficient Adjoint Sensitivity Analysis Exploiting the FD-BPM

Recent trends in optical MEMS for telecommunication applications

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