Power skiving is an efficient manufacturing way that has been well applied to spur gears. By considering the conjugation between the face gear and spur gear of a pair of face gear drive, the power skiving of face gears has also been drawn much attention. However, it is still very challenging to achieve the accurate machining due to its complex error sources coupling from both theoretical and practical aspects, and they have not been considered in a systematic way in the existing methods to stably ensure the machining accuracy. To solve this problem, this work proposes a comprehensive optimization model to the accurate power skiving of spur face gears. In the first stage, the theoretical machining errors are minimized by optimizing the parameters of both the cutting edges and tool path. In the second stage, the practical power skiving is implemented with a closed-loop manufacturing process, of which the machining errors are obtained from measurements and further compensated by optimizing the tool path in the next machining till it is acceptable. Three cases are given and discussed, and the results show the priority and validity of the proposed method.