Modeling of Dual-Backplate based Airborne CMUTs with Enhanced Bandwidth

Anzinger, Sebastian; Fusco, Alessandra; Tumpold, David; Bretthauer, Christian; Dehe, A.

doi:10.1109/ius46767.2020.9251571

Cited by 8 publications

(3 citation statements)

References 7 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The large signal non-linear model can also be utilized as a powerful tool to simulate the reliability performance of the MEMS devices which involves extremely high pressure events [24]. The described model capability will also be useful for accurately modeling dual backplate or sealed dual membrane MEMS microphone structures [25] - [26].…”

Section: Discussionmentioning

confidence: 99%

A Behavioral Non-Linear Modeling Implementation for MEMS Capacitive Microphones

SHUBHAM¹

2022

Preprint

View full text Add to dashboard Cite

<p>We highlight the behavioral non-linear system-level modeling approach for MEMS capacitive microphones. The combination of the finite element modeling and the large signal non-linear circuit modeling provide a strong capability to predict electro-acoustic performance for capacitive transductions. The circuit simulator tool such as Cadence Virtuoso has emerged as a powerful tool in designing behavioral models both in linear as well as in non-linear regimes. Typical small signal lumped element models fail to capture the MEMS behavior which changes over pressure and bias conditions. The models described herein capture diaphragm displacement and capacitance change over large pressure ranges for a simply supported circular plate. This can be coupled with the electrostatic force, due to the applied bias voltage, and is converted back to pressure thereby realizing a feedback loop in the circuit model. The non-linear model capability is extended to predict capacitance-bias behavior and estimate pull-in of the MEMS device. The microphone sensitivity, signal-to-noise ratio and harmonic distortions are accurately predicted using the non-linear large signal model when compared with measured microphone data.</p>

show abstract

Section: Discussionmentioning

confidence: 99%

A Behavioral Non-Linear Modeling Implementation for MEMS Capacitive Microphones

SHUBHAM¹

2022

Preprint

View full text Add to dashboard Cite

show abstract

“…Most of the time and to increase their radiated power, these transducers are assembled in matrices. In [63] and more succinctly in [64], an electrical equivalent circuit is used to simulate an array of dual backplate capacitive ultrasonic transducers. This comprehensive study integrates the simulation of the sensitivity, the spectral noise density and the directivity of the matrix of transducers.…”

Section: Capacitive Micromachined Ultrasonic Transducers (Cmut) and P...mentioning

confidence: 99%

Equivalent electrical circuits for electroacoustic MEMS design: a review

Liechti

2024

J. Micromech. Microeng.

View full text Add to dashboard Cite

At the era of powerful computers, it’s tempting to employ finite element models early in the design phase of a device. However, especially for MEMS devices, the dimensional ratios and short wavelengths compared to the device’s dimensions, along with the involvement of multiple physics, can necessitate complex and computationally intensive models, making them impractical for optimization processes. Hence, reduced order models, like the lumped element model, are often preferred as they accurately represent complex system behavior within a defined frequency range. This review explores the use of lumped element models and their corresponding electrical equivalent circuits for simulating MEMS electro-acoustic devices, offering insights into their diverse applications within this specific domain.

show abstract

“…The central area of the membrane is the area of maximum displacement, therefore this part generates more signals than the other areas. In Figure 3 it is clearly showed that the current capacitive MEMS membrane behavior is only approximately described by a parallel plate capacitor, while its behavior is quite different [11]. To optimize the signal from the membrane and make its behavior more similar to that of a parallel plate capacitor, a new anchoring method of the membrane is proposed.…”

Section: Membrane Clampingmentioning

confidence: 99%

Improved MEMS microphone frequency response through design-optimization

DENĞİZ

2023

Journal of Smart Systems Research

View full text Add to dashboard Cite

Microphone main characteristic is to faithfully detect and transform incoming acoustic signal in electric one. Semiconductor based capacitive MEMS microphones, despite their limited dimensions, offer remarkable performances (frequency response, SNR). The purpose of this article is to introduce some design optimizations in the current SDM (Sealed-Dual-Membrane) capacitive MEMS microphone mainly concerning the position of the ventilation hole. The effects of the suggested modifications on the microphone’s performances were evaluated using Lumped Model simulation tool. A clear improvement in the device frequency response within audio-band was obtained even if a less significant improvement in the general performances of microphone (SNR) was achieved.

show abstract

Modeling of Dual-Backplate based Airborne CMUTs with Enhanced Bandwidth

Cited by 8 publications

References 7 publications

A Behavioral Non-Linear Modeling Implementation for MEMS Capacitive Microphones

A Behavioral Non-Linear Modeling Implementation for MEMS Capacitive Microphones

Equivalent electrical circuits for electroacoustic MEMS design: a review

Improved MEMS microphone frequency response through design-optimization

Contact Info

Product

Resources

About