Modeling of a Passive-Valve Piezoelectric Micro-Pump: A Parametric Study

Aboubakri, Akam; Ahmadi, Vahid; Koşar, Ali

doi:10.3390/mi11080752

Cited by 10 publications

(7 citation statements)

References 31 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The external active valve is driven by a modular part or pneumatic part. Mechanical passive valve, as the most traditional valve applied on piezoelectric pump [66,67], is named as check valve. The non-mechanical passive valve is also called non-moving part valve, and the piezoelectric pump applied with this valve is named as valveless piezoelectric pump [68,69], which is often shown as diffuser/nozzle structure.…”

Section: Comparison Of Different Valve and Working Principles Of Valv...mentioning

confidence: 99%

Recent trends in structures and applications of valveless piezoelectric pump—a review

et al. 2022

J. Micromech. Microeng.

View full text Add to dashboard Cite

Piezoelectric actuator-driven valveless pump has been studied for a long time in theory and structure for the features of high precision, fast response, low power consumption, compact size, reliability for long-term use and high performance. The pump has a remarkable significance for drug delivery, biological application, chemical analysis, high precision gluing, solder paste, lubrication system and electronic chip cooling system, etc. However, a higher requirement on the control circuit and power supply for the pump is raised, also, the driving voltage of the pump should be further reduced. In this review, the piezoelectric pump with and without valve is analysed in working principle. Then, the recent trends of valveless pump in different structures are discussed. The representative structural designs in different thinking are introduced in the working media, driven voltage, frequency, flow rate, pressure, and the efficiency of the pump, the performance of different pumps are also compared. Afterwards, the application of the pump for different purposes with featured structures are presented. Next are the limitations and the outlook of the pump, which provides some potential research points for subsequent studies, and ended with a summary. This review concludes the recent trends of valveless piezoelectric pump in structural and application, attempts to guide the researchers with different professional backgrounds that can solve current problems through cross-disciplinary approaches.

show abstract

Section: Comparison Of Different Valve and Working Principles Of Valv...mentioning

confidence: 99%

Recent trends in structures and applications of valveless piezoelectric pump—a review

et al. 2022

J. Micromech. Microeng.

View full text Add to dashboard Cite

show abstract

“…Micro-pumps are structurally divided into valved and non-valved micro-pumps [3]. Valved micro-pumps have a good check effect and can control fluid flow, but valved micro-pumps have a complex structure and are not easy to fabricate [4]. Valveless piezoelectric pumps are relatively simple in structure and easy to miniaturize and integrate [5].…”

Section: Introductionmentioning

confidence: 99%

Drive simulation analysis of piezoelectric valveless micropump based on ZnO nanorod array

Song,

Fu,

Hou

et al. 2023

J. Phys.: Conf. Ser.

View full text Add to dashboard Cite

In this paper, ZnO nanorods are combined with the driving mechanism of a piezoelectric micropump to design a valveless piezoelectric micropump. The ZnO nanorods were prepared by the magnetron sputtering method to grow the ZnO seed crystal layer on the silicon surface and then by hydrothermal method. The growth of ZnO nanorods under different solution concentrations, solution temperatures, and growth times was investigated, and analytical methods for analyzing the surface morphology and elemental content of ZnO nanorods. Then, the simulation of the valveless micropump using ZnO nanorods prepared under optimal conditions as piezoelectric oscillators were carried out using COMSOL finite element analysis software, and the maximum output flow rate of about 14.40 μL/s was achieved at 100 V50 Hz.

show abstract

“…During recent years, microfluidic systems have received increasing attention as they could be implemented to a wide range of applications such as drug delivery and fluid manipulation [1,2], disease diagnostics [3], isolation of microparticles/cells [4,5], and micromixing [6]. Micropumps are among the most significant microfluidics devices enabling to provide controllable fluid flow rates.…”

Section: Introductionmentioning

confidence: 99%

“…The pumps with valves consist of a pumping chamber with a diaphragm (pumping membrane), connecting channels, and two check valves. The working principle of these pumps is similar to reciprocating macro-scale pumps, where the outlet and inlet are closed or opened over the suction and discharge phases, respectively [2]. On the other hand, valveless micropumps possess a more simple structure since the valves are replaced with a pair of diffuser-nozzle elements.…”

Section: Introductionmentioning

confidence: 99%

“…Zhou and Amirouche [13] electromagnetically actuated a valveless single chamber planar valveless micropump made of PDMS. The governing mechanism regarding diaphragm vibration and piezoelectric actuator was described in the study of Aboubakri et al [2]. They also carried out a comprehensive parametric study on PZT micropumps with control valves.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Fabrication and flow rate characterization of a DRIE process based valveless piezoelectric micropump

ŞİMŞEK¹,

Ahmadi²,

Çelik³

et al. 2022

J. Micromech. Microeng.

Self Cite

View full text Add to dashboard Cite

Micropumps have become one of the major research topics in the field of microfluidics. Different actuators have been used in active micropumps including piezoelectric ones, which convert electrical energy to mechanical energy. In this study, a piezoelectric disc was designed as an actuator and was integrated into a fabricated piezoelectric micropump. Unlike wet etching methods, which is generally used to etch layers of relatively high thickness in the silicon wafer, dry etching was used in this study. Aluminum was used as a mask material during the fabrications-steps, and the fabrication process was shortened with the use of the masking steps. The etching process of the slot, in which the piezoelectric disc was placed, and etching of the inlet/outlet channels were performed simultaneously. Thus, the processing time was significantly shortened. The fabrication of this silicon-based valveless micropump was accomplished by using the DRIE (Deep Reaction-Ion Etching) technique, which provided controlled etching. Experiments were conducted on the fabricated micropump with the use of the bulk micromachining technology to deliver the desired pumping action. The leakage and the air entrapment between the consecutive micropump structural layers were satisfactorily eliminated. This micropump is capable of delivering a promising flow rate of 52 [µL/min] for deionized water, which corresponds to a 150 [Hz] square wave type and a peak-to-peak voltage of 60 [V] Vp-p . No moving mechanical valves were included so that the risks of clogging, reduced performance, and reduced reliability due to wear and fatigue were minimized. Not only gases and liquids but also fluids containing particles could be used as the working fluid for this micropump. The piezoelectric micropump design was optimized to achieve a high time-averaged flow rate (>50 [µL/min]) with a relatively low excitation voltage (<100 [V] Vp-p ) as opposed to the use of a high excitation voltage.

show abstract

Modeling of a Passive-Valve Piezoelectric Micro-Pump: A Parametric Study

Cited by 10 publications

References 31 publications

Recent trends in structures and applications of valveless piezoelectric pump—a review

Recent trends in structures and applications of valveless piezoelectric pump—a review

Drive simulation analysis of piezoelectric valveless micropump based on ZnO nanorod array

Fabrication and flow rate characterization of a DRIE process based valveless piezoelectric micropump

Contact Info

Product

Resources

About