Modeling Microwave Resonance of Curling Probe for Density Measurements in Reactive Plasmas

Liang, Iji; Nakamura, Keiji; Sugai, Hideo

doi:10.1143/apex.4.066101

Cited by 49 publications

(68 citation statements)

References 19 publications

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“…Thus in this work, the electromagnetic microwaves is modeled using a commercial computerbased electromagnetic field simulation "CST Microwave Studio". One of the advantages of the CST microwave studio is its ability to model complex geometries, of real plasma sources applied for plasma processing [10][11][12][13]. The software package is based on the finite integral method (FIM) representing a discrete analogue of Maxwell's equations on a computational grid [14].…”

Section: Introductionmentioning

confidence: 99%

Experimental and Numerical Investigations of Line-Shaped Microwave Argon Plasma Source

Abdel‐Fattah¹,

Shindo²,

Sabry³

et al. 2015

PIER M

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Abstract-In the following, numerical and experimental results for a line-shaped argon plasma source over a wide range of gas pressure (2-50 Torr) and microwave power (200-800 W) are presented. The line-shaped plasmas have been generated in a rectangular Pyrex tube, 15 mm in height and 5 mm inner width placed-in a linear slot made in the upper wide wall of a custom-made narrow rectangular waveguide. The microwave power is coupled to the discharge gas via the slot. The effects of the waveguide width, power level (electron density, and discharge tube insertion depth on the excited axial (along x) electric field profile and hence the uniformity of the produced plasmas are investigated numerically using commercial software CST Microwave Studio R , and charge coupled device (CCD) camera. Results showed that, a uniform line-shaped plasma is generated as waveguide width decreased to 58 mm, plasma density value n res = 3.7 × 10 11 cm −3 , and discharge tube insertion depth = 0 mm. An optical emission spectroscopy study was also realized to deduce the relative density of argon species and electron excitation temperature T exc . In general, argon spectral lines intensity was increased enhanced markedly when microwave power increased, while the different lines showed different behavior as argon pressure increased. The electron excitation temperature T exc decreases with increasing argon pressure, but almost constant overall the whole plasma length.

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Section: Introductionmentioning

confidence: 99%

Experimental and Numerical Investigations of Line-Shaped Microwave Argon Plasma Source

Abdel‐Fattah¹,

Shindo²,

Sabry³

et al. 2015

PIER M

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“…In 2011, Liang et al [15] proposed a new type of microwave resonator probe: a spiral-shaped slot-type antenna, also called the curling probe (CP), for measurements in reactive plasmas. The resonator is excited by a monopole antenna in its central aperture.…”

mentioning

confidence: 99%

“…Most recently, the group of Chubu University in Japan performed CP measurements to monitor the dielectric layer deposited during plasma processing in a 13.56 MHz RF inductive plasma discharge. Hotta et al [20] used a CP in the chamber wall of the reactor and measured a frequency shift of 230 MHz, corresponding to a density of approximately 2.9x10 10 cm −3 using the CP method proposed by Liang et al [15]. Ogawa et al [21] developed a technique to measure the thickness of the deposited film and the electron density simultaneously using two different-sized CPs.…”

mentioning

confidence: 99%

The curling probe: A numerical and experimental study. Application to the electron density measurements in an ECR plasma thruster

Boni

Jarrige

Désangles

et al. 2021

Review of Scientific Instruments

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HAL is a multi-disciplinary open access archive for the deposit and dissemination of scientific research documents, whether they are published or not. The documents may come from teaching and research institutions in France or abroad, or from public or private research centers. L'archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau recherche, publiés ou non, émanant des établissements d'enseignement et de recherche français ou étrangers, des laboratoires publics ou privés.

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“…One class of APRS probes excites electrostatic resonances [2][3][4][5][6][7][8][9], which occur below ω pe and can be described by a model of the probeplasma system in an electrostatic approximation. Many approaches to understand these resonance phenomena have been reported [10][11][12][13][14][15][16][17][18][19][20][21][22][23][24][25]. They have in common, that their models are based on a fluid dynamical description and they focus only on a specific design of a certain probe.…”

Section: Introductionmentioning

confidence: 99%

The planar Multipole Resonance Probe: a functional analytic approach

Friedrichs

Oberrath

2018

EPJ Techn Instrum

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Active Plasma Resonance Spectroscopy (APRS) is a well known diagnostic method, where a radio frequency probe is immersed into a plasma and excites plasma oscillations. The response of the plasma is recorded as frequency dependent spectrum, in which resonance peaks occur. By means of a mathematical model plasma parameters like the electron density or the electron temperature can be determined from the detected resonances. The majority of all APRS probes have in common, that they are immersed into the plasma and perturb the plasma due to the physical presence of the probe. Thus, they are invasive and can at least influence the homogeneity of the plasma. To overcome this problem, the planar Multipole Resonance Probe (pMRP) was invented, which can be integrated into the chamber wall of a plasma reactor. Within this paper, the first analytic model of the pMRP is presented, which is based on a cold plasma description of the electrons. The general admittance of the probe-plasma system is derived by means of functional analytic methods and a complete orthonormal set of basis functions. Explicit spectra for an approximated admittance including a convergence study are shown. The determined resonance frequencies are in good agreement with former simulation results.

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Modeling Microwave Resonance of Curling Probe for Density Measurements in Reactive Plasmas

Cited by 49 publications

References 19 publications

Experimental and Numerical Investigations of Line-Shaped Microwave Argon Plasma Source

Experimental and Numerical Investigations of Line-Shaped Microwave Argon Plasma Source

The curling probe: A numerical and experimental study. Application to the electron density measurements in an ECR plasma thruster

The planar Multipole Resonance Probe: a functional analytic approach

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