Modeling MEMS resonators with rod-like components accounting for anisotropy, temperature, and strain dependencies

Abstract

Numerous systems can be described using masses and rods in transverse vibration. Motivated by the desire to model the effects of axial strain and temperature on systems of this type, we develop a procedure to determine the frequencies of transverse vibration of devices composed of rods and rigid masses as functions of these effects. Our models allow for the rods to be composed of anisotropic materials with material symmetry contained in the cubic system. The goal of the present paper is to demonstrate the modeling procedure using the example of a double-ended tuning fork (DETF). Following this, the results of a slightly more complicated model are compared with the experimental results found for a prototype MEMS DETF sensor composed of polycrystalline silicon.