2013
DOI: 10.1016/j.mee.2013.03.038
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Modeling, fabrication and characterization of micro-coils as magnetic inductors for wireless power transfer

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Cited by 30 publications
(19 citation statements)
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“…As first process step, a 2 m of 99.99% aluminum layer was sputtered, followed by the first photolithography. The bottom electrode or the first coil level was defined via SiCl 4 /Ar/N 2 inductive coupled plasma reactive ion etching (ICP RIE) [25]. A 2 m thick silicon oxide layer was then sputtered to insulate the first metal layer.…”
Section: Coil Fabrication and Experimental Setupmentioning
confidence: 99%
“…As first process step, a 2 m of 99.99% aluminum layer was sputtered, followed by the first photolithography. The bottom electrode or the first coil level was defined via SiCl 4 /Ar/N 2 inductive coupled plasma reactive ion etching (ICP RIE) [25]. A 2 m thick silicon oxide layer was then sputtered to insulate the first metal layer.…”
Section: Coil Fabrication and Experimental Setupmentioning
confidence: 99%
“…The experimental results show that the average efficiency of the proposed method is able to reach as high as 53% [5]. There are some other people who have made some wireless energy transmission solutions, and they all have achieved good results [6][7][8][9][10]. In this paper, We have simulated efficiencies of the system in the air and seawater and compared them.…”
Section: Introductionmentioning
confidence: 99%
“…In order to perform this function, implants require a continuous, efficient power supply (Amato et al 2013) that would preferably transmit power wirelessly, thus minimizing the risk of infection, patient discomfort, pain, health care costs and the need for implantable batteries. Inductive power transfer is therefore a necessary technology in developing safer, more robust devices with lower risk of tissue damage caused by long periods of continuous transcutaneous connections (Amato et al 2013;Jow and Ghovanloo 2007;Kadefors et al 1969;Neagu et al 1997). The efficiency of wireless power-transfer however, strongly depends on a variety of parameters such as, the materials used, coupling and distance between the transfer and receiver coils and their geometrical dimensions, for example the length and cross-section of the coil wire.…”
Section: Introductionmentioning
confidence: 99%
“…The efficiency of wireless power-transfer however, strongly depends on a variety of parameters such as, the materials used, coupling and distance between the transfer and receiver coils and their geometrical dimensions, for example the length and cross-section of the coil wire. Besides the outer and inner diameter of the coils, properties of the encapsulation materials influence the overall efficiency of the implant system (Amato et al 2013). The efficiency of coils is measured by their quality factor (Q-factor), which is defined as the ratio of the electromagnetic energy transmitted (E tr ) to the receiver coil and energy dissipated (E dis ) through it according to Equation (1).…”
Section: Introductionmentioning
confidence: 99%