Modeling Epitaxial Layer Growth from Gas Phase for Analysis of Influence of Changing Technological Process with Variation in Growth Zone Heating

Abstract

In this paper, we analyze the nonstationary heat transfer during growth of epitaxial layers in epitaxy reactors from the gas phase. Based on this analysis, we formulate several recommendations on organization of heating of the growth zone for increasing homogeneity of epitaxial layers. We introduce an analytical approach for analysis of heat transfer during the growth of epitaxial layers from the gas phase. The approach gives a possibility to simultaneously take into account the nonlinearity of heat transfer, as well as changes of their parameters both in space and time.