“…In addition, because of the smaller footprints and excellent frequency performance characteristics of RF SAW filters, the trend now is to integrate multiple filters into RF modules with switches and power amplifiers. (10)(11)(12) Figure 1 shows the lumped circuit model of a one-port acoustic resonator near resonance, where L m is the motional inductance, C m is the motional capacitance, R m is the motional resistance, and C T is the static capacitance. (5,6) Although well-experienced RF circuit designers can understand the behavior of the components in the network by using a related high-frequency computer-aid software program, the key bottleneck is how to convert the lumped circuit model into structure parameters, which include the period of the interdigital transducer (IDT) (λ), the number of IDT pairs (N p ), the IDT aperture (A), the metal thickness ratio of the electrode (h/λ), and the metallization ratio of the SAW resonator (η).…”