Modeling, design and fabrication of a triple-layered capacitive pressure sensor

Zhou, Min-Xin; Huang, Qing‐An; Qin, Ming

doi:10.1016/j.sna.2004.05.036

Cited by 51 publications

(24 citation statements)

References 11 publications

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“…For example, for CMUTs, this deflection determines the capacitance change and thus the electromechanical coupling coefficient which characterizes the transducer bandwidth and sensitivity [7], [10]. For capacitive pressure sensors, the deflection of the flexible microplate as a result of both the electrostatic force and the pressure determines the capacitance variation and thus the sensor sensitivity and nonlinearity [2], [11]. If the applied voltage increases up to a critical value beyond which the mechanical restoring force of the microplate can no longer balance the electrostatic force, the flexible microplate will collapse and make contact with the rigid microplate.…”

mentioning

confidence: 99%

An Improved Method for the Mechanical Behavior Analysis of Electrostatically Actuated Microplates Under Uniform Hydrostatic Pressure

Zhao

Jiang

et al. 2015

J. Microelectromech. Syst.

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Microplates are essential components of the most electrostatically actuated microdevices. Their mechanical behavior is influenced not only by electrostatic force, but by hydrostatic pressure of the environment. This paper presents an improved reduced-order model for an electrostatically actuated microplate under uniform hydrostatic pressure with a novel method for treating the electrostatic force. The model was developed using the Galerkin method and turns the partial-differential equation governing the plate into an ordinary equation system. Using an axisymmetric deflection function and the first-order Taylor series expansion of the electrostatic force, explicit expressions for the deflection and pull-in voltage of the microplate under the electrostatic force alone, and under both electrostatic force and hydrostatic pressure, were derived. The expressions with only the electrostatic force considered can predict the pull-in voltage with a higher accuracy and the deflection within a large range (from the undeformed state to the pull-in position) compared with literature. The expressions for both types of loadings show a better prediction accuracy when the pressure changes in the lower pressure range. The derived expressions are applicable to the electrostatically actuated configurations where the ratio of the plate diameter to its thickness varies from 100 to 40, and the electrode distance is smaller than or equal to the thickness. These theoretical analyses were validated with finite element method simulations and previous literature.[ 2014-0012]Index Terms-Capacitance variation, electrostatically actuated microplate, electrostatic force, pull-in voltage, static deflection, uniform hydrostatic pressure.

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mentioning

confidence: 99%

An Improved Method for the Mechanical Behavior Analysis of Electrostatically Actuated Microplates Under Uniform Hydrostatic Pressure

Zhao

Jiang

et al. 2015

J. Microelectromech. Syst.

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“…These equations can further be cast in a matrix form which can be solved using any general numerical equation solver. An iteration procedure is established by taking the corresponding linear solution of lateral slope as the initial values [15]. These are substituted into the second set of simultaneous equations to solve for a primary solution for the radial force resultant, {S r }.…”

Section: Finite Difference Numerical Methodsmentioning

confidence: 99%

“…Among them, the former ([Poly-Si/Si/Poly-Si]) is nearly monolithic simulating a single-layered plate (NMP), while the latter represents a typical layered plate (TLP). The material properties including Young's moduli and Poisson's ratios for the layers are listed in Table 1 which essentially follow those of Zhou, et al [15]. All the remaining physical parameters of the problems were adopted from those employed by Sheplak and Dugundji [5] and Wang, et al [8].…”

Section: Numerical Remarksmentioning

confidence: 99%

Nonlinear mechanical sensitivity in large deflection of elastically-bossed sensor plate under initial tension

Chen

Gao

2010

2010 5th International Microsystems Packaging Assembly and Circuits Technology Conference

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The nonlinear mechanical sensitivity in large deflection of an elastically bossed-layered plate under initial tension due to lateral load is studied. The approach follows von-Karman plate theory for large deflection. The nonlinear governing equations were developed, for both the center boss and the annular layered plate, in terms of lateral slope and radial force resultant. These equations were solved numerically using a finite difference method with the aid of an iteration procedure, by taking the simplified linear analytical solution of lateral slope as the initial guess for the nonlinear problem. Upon solving for the geometrical responses, the laminate constitutive law was utilized and the outermost radial stress (mechanical sensitivity) was further evaluated. For a nearly monolithic plate with a thin boss, the obtained solutions correlate very well with those available in literature for a single-layered flat plate, thus validates the presented approach. For typically-layered annular plates combined with monolithic center boss, the nonlinear behavior is found to arise normally as the lateral pressure or the intial tension turns to be large. Varying the central boss size may also have a sensible influence upon the behavior of the bossed layered plate. Specifically, mechanical sensitivity is found to increase as the rigidity, i. e., the thickness ratio between the central boss and that of the annular plate is incresed, but the magnitude decreases as the initial tension is raised.

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“…Among them, the former (L a plate) simulates a nearly monolithic plate (NMP), while the latter represents a typical layered plate (TLP). The material properties including Young's moduli and Poisson's ratios for the layers are given in Table 1, which essentially follows those employed by Zhou, et al [13]. The applied voltage is taken to be V=1, 5, 10, 20, and 30 (Volt) and piezoelectric constant considered by Wang, et al.…”

Section: Numerical Remarksmentioning

confidence: 99%

Nonlinear geometrical responses in large deflection of un-symmetrically layered piezo-electric plate under initial tension

Chen

2011

2011 6th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT)

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The nonlinear geometrical responses in large deflection of an unsymmetrically piezo-electric layered plate under initial tension are studied. von Karman plate theory for large deflection is utilized and extended to an un-symmetrically layered plate including a piezoelectric layer. The nonlinear governing equations are derived, first, in a non-dimensional form in terms of lateral slope and radial force resultant. These equations are solved using a numerical finite difference method with the aid of the clamped-ended boundary conditions of the problem and an iteration procedure, by taking the associated linear analytical solution of lateral slope as the initial guess. For a nearly monolithic plate under a very low applied voltage, the results agree well with available solutions for a singlelayered case due to uniform lateral load in literature and thus the present approach is validated. For a two-layered un-symmetric plate made of typical silicon-based materials, the results show that piezoelectric effect seems to be apparent only up to a moderate initial tension and a moderate lateral pressure. Under this circumstance, the higher the applied voltage, the greater the central deflection; and hence the plate may transit to a membrane in a relatively low pretension condition. For a relatively high pretension or a severe lateral load, however, the piezoelectric effect becomes insignificant. Moreover, the effects of initial tension and lateral load may merge to become dominant, yielding nearly the same responses, regardless of the magnitude of the applied voltage.

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Modeling, design and fabrication of a triple-layered capacitive pressure sensor

Cited by 51 publications

References 11 publications

An Improved Method for the Mechanical Behavior Analysis of Electrostatically Actuated Microplates Under Uniform Hydrostatic Pressure

An Improved Method for the Mechanical Behavior Analysis of Electrostatically Actuated Microplates Under Uniform Hydrostatic Pressure

Nonlinear mechanical sensitivity in large deflection of elastically-bossed sensor plate under initial tension

Nonlinear geometrical responses in large deflection of un-symmetrically layered piezo-electric plate under initial tension

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