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1989
DOI: 10.1109/12.21146
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Modeling defect spatial distribution

Abstract: The center-satellite model for describing the distribution of defects on wafers is discussed. This model assigns each defect to a cluster. The distribution of cluster centers on a wafer is one basic component of the model. The other basic component is the distribution of defects (satellites) about the cluster centers. Physical justification for the model is provided. Current yield models are quite accurate for VLSI designs without redundancy. A more flexible model is needed to evaluate the redundancy technique… Show more

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Cited by 81 publications
(20 citation statements)
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“…Although other models have been suggested (e.g., [69]), we will concentrate in this paper on this family of distributions due to the ease of calculation when using the Poisson distribution, the relative ease of the integration (analytical or numerical) needed for the compounding, and the documented good fit of these distributions to empirical data [17].…”
Section: A the Poisson And Compound Poisson Yield Modelsmentioning
confidence: 99%
“…Although other models have been suggested (e.g., [69]), we will concentrate in this paper on this family of distributions due to the ease of calculation when using the Poisson distribution, the relative ease of the integration (analytical or numerical) needed for the compounding, and the documented good fit of these distributions to empirical data [17].…”
Section: A the Poisson And Compound Poisson Yield Modelsmentioning
confidence: 99%
“…These Markov chains assume the defects "arrive" in a random order, so it is most relevant for repair algorithms that process one defect at a time and get their defects in random order (or are not harmed by ordering). This is the same technique as that used in [4]. Contrast this with the methods of [2,6], which rely, for example, on fault trees.…”
Section: Yield Resultsmentioning
confidence: 99%
“…Starting from (12), the second step of method A introduces the clustering effect that was not considered in the computation of Y r [by (11)]. λ r can be considered as the average number of faults left unrepaired after the first step; this is obtained by inverting the Poisson expression computed for k = 0, i.e., Y r = e −λ r .…”
Section: A Methods Amentioning
confidence: 99%