Modeling and Simulation of Novel Semiconducting Metal Oxide Gas Sensors for Wearable Devices

Lahlalia, Ayoub; Filipovic, Lado; Selberherr, S.

doi:10.1109/jsen.2018.2790001

Cited by 37 publications

(28 citation statements)

References 31 publications

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“…As the miniaturization of the devices has shown better response times, of the order of seconds to milliseconds, and power consumption of 80 mW, as reported by the Stratulat et al [124], it has a good potential to be used integrated in an IoT solution. Although no commercial solutions were found employing nanomaterials or microelectromechanical systems (MEMS), this has shown to be a promising technology to future products, allowing the development of embedded systems to measure gas concentrations in diverse scenarios, with lower power consumption than the traditional MOS transducers [125].…”

Section: Metal Oxide Semiconductorsmentioning

confidence: 99%

IoT-Enabled Gas Sensors: Technologies, Applications, and Opportunities

Gomes

Rodrigues

Rabêlo

et al. 2019

JSAN

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Ambient gas detection and measurement had become essential in diverse fields and applications, from preventing accidents, avoiding equipment malfunction, to air pollution warnings and granting the correct gas mixture to patients in hospitals. Gas leakage can reach large proportions, affecting entire neighborhoods or even cities, causing enormous environmental impacts. This paper elaborates on a deep review of the state of the art on gas-sensing technologies, analyzing the opportunities and main characteristics of the transducers, as well as towards their integration through the Internet of Things (IoT) paradigm. This should ease the information collecting and sharing processes, granting better experiences to users, and avoiding major losses and expenses. The most promising wireless-based solutions for ambient gas monitoring are analyzed and discussed, open research topics are identified, and lessons learned are shared to conclude the study.Technologies to sense gases and wireless communications support are elaborated in Sections 5 and 6, respectively. The most promising solutions in terms of sensing methods and IoT-enabled solutions are discussed in Section 7 and open research topics are identified. Lessons learned are shared at Section 8 and, finally, Section 9 concludes the study. Background on Environmental GasesSome gases are the key to ensure the functionality of systems and entire industries, as well as the presence of other gases being a problem in other fields, causing the loss of entire production lines, as in the food industry, or even cause the loss of lives and explosions. In this section, the most important gases in terms of pollution monitoring and control, health issues, and accident prevention are listed with their main characteristics.Oxygen (O 2 ) is the most important gas for life, and is crucial in numerous fields. Patients under anesthesia, or recovering from surgery and from certain diseases need controlled O 2 doses to keep them alive and fully recovered. The decrease of oxygen levels in enclosed spaces can be related with other gases leakage, which would lead people inside these spaces to asphyxiate, leading to an unconscious state, or even to death [29]. Numerous industrial processes rely on the correct concentration of this gas to achieve the best results, mainly chemical and combustion, which without the correct percentages will not grant the best performance of systems. Engine control systems depend on the correct mixture to achieve the expected performances, whether it is lower fuel consumption or power and speed [29][30][31][32].Carbon dioxide (CO 2 ) is a colorless, odorless gas, generated by the oxidation and combustion of hydrocarbon, as well as by living beings in the respiration process. It is a key gas for the greenhouse effect, and the increase of its levels, in the presence of other gases, is related with atmospheric pollution. It is also the key gas on the oxygen production by the photosynthesis process. The accumulation of this gas in enclosed spaces can be responsible to s...

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Section: Metal Oxide Semiconductorsmentioning

confidence: 99%

IoT-Enabled Gas Sensors: Technologies, Applications, and Opportunities

Gomes

Rodrigues

Rabêlo

et al. 2019

JSAN

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“…The sensing material is deposited on top of the membrane, followed by the metal contacts. 78 This novel technique allows for a fully front-side fabrication without the need for corrosive wet chemical etchants, while being compatible with CMOS fabrication. The applied sensing layer is tin dioxide (SnO 2 ), one of the most promising metal oxide materials for gas sensor applications.…”

Section: Semiconductor Metal Oxide Sensorsmentioning

confidence: 99%

“…96 The membrane, which surrounds the microheater, is usually comprised of some combination of silicon dioxide (SiO 2 ) and silicon nitride (Si 3 N 4 ). 70,78,97 The membrane is important in providing a platform on which the microheater and sensing film are suspended. Recent interest in SiC based microheaters stray from the typical SiO 2 /Si 3 N 4 stack, but their fabrication is very complex and thereby also cost intensive.…”

Section: Microheater Designmentioning

confidence: 99%

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Review—System-on-Chip SMO Gas Sensor Integration in Advanced CMOS Technology

Filipovic

Lahlalia

2018

J. Electrochem. Soc.

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The growing demand for the integration of functionalities on a single device is peaking with the rise of IoT. We are near to having multiple sensors in portable and wearable technologies, made possible through integration of sensor fabrication with mature CMOS manufacturing. In this paper we address semiconductor metal oxide sensors, which have the potential to become a universal sensor since they can be used in many emerging applications. This review concentrates on the gas sensing capabilities of the sensor and summarizes achievements in modeling relevant materials and processes for these emerging devices. Recent advances in sensor fabrication and the modeling thereof are further discussed, followed by a description of the essential electro-thermal-mechanical analyses, employed to estimate the devices' mechanical reliability. We further address advances made in understanding the sensing layer, which can be modeled similar to a transistor, where instead of a gate contact, the ionosorped gas ions create a surface potential, changing the film's conduction. Due to the intricate nature of the porous sensing films and the reception-transduction mechanism, many added complexities must be addressed. The importance of a thorough understanding of the electro-thermal-mechanical problem and how it links to the operation of the sensing film is thereby highlighted.

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“…The two recently suggested novel geometries, which address key concerns for gas sensor developers are: microheater array design and dual hotplate design. A short description of the designs will be given here, while an in-depth analysis is provided in Lahlalia et al (3). The microheater array is shown in Figure 6 (left) and combines small resistances in an array instead of a conventional single-layer microheater.…”

Section: Microheater Designmentioning

confidence: 99%

(Invited)System-on-Chip Sensor Integration in Advanced CMOS Technology

Filipovic
¹
,

Lahlalia
²

2018

ECS Trans.
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The growing demand for the integration of several functionalities on a single device has peaked with the rise of the Internet of Things. We are technologically near to having sensors in portable and wearable technologies, a feat made possible by the integration of sensor fabrication with CMOS manufacturing. In this paper we address semiconductor metal oxide sensors, which have the potential of becoming a universal sensor. We describe recent capabilities to model relevant materials and processes for these emerging devices and present optimized designs based on those analysis. In this review we discuss the modeling of sensor fabrication, followed by electro-thermo-mechanical analyses, which are essential to estimating stress build-up and sensor lifetimes. We further address the recent advances in understanding the metal oxide layer, which can be treated similarly to a semiconductor transistor, where ionosorption of gas ions creates a surface potential, changing the conducting behavior of the thin film.

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Modeling and Simulation of Novel Semiconducting Metal Oxide Gas Sensors for Wearable Devices

Cited by 37 publications

References 31 publications

IoT-Enabled Gas Sensors: Technologies, Applications, and Opportunities

IoT-Enabled Gas Sensors: Technologies, Applications, and Opportunities

Review—System-on-Chip SMO Gas Sensor Integration in Advanced CMOS Technology

(Invited)System-on-Chip Sensor Integration in Advanced CMOS Technology

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