Modeling and Performance of a Magnetic MEMS Wiping Actuator

Gray, G.D.; Kohl, Paul A.

doi:10.1109/jmems.2006.876787

Cited by 7 publications

(6 citation statements)

References 8 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…This behavior of BMs is of particular importance at the microlevel when power consumption and heat dissipation are often a major concern. Thus, BMs are gaining more attention in MEMS applications such as accelerometers [6], positioners [7], valves [8], actuators [9][10][11], switches [1,[12][13][14][15] and micro-relays [2,3,[16][17][18].…”

Section: Introductionmentioning

confidence: 99%

Torsion/cantilever-based MEMS bistable mechanisms with different support configurations: structure design and comparison

Wu¹,

Zhang

Wang

et al. 2011

J. Micromech. Microeng.

View full text Add to dashboard Cite

Three types of torsion/cantilever-based MEMS bistable mechanisms (BMs) with different support configurations have been constructed, modeled and experimented. For the support configuration, there is a crisscross-shaped, a ring-shaped and a diamond-shaped support beam, respectively. The proposed MEMS BMs consist of a free–free torsion-based cantilever which forms a symmetrical rocker lever. The free–free cantilever is suspended by a support skeleton which in turn is attached to a torsion cantilever. A permanent magnet is attached beside for holding the closed state with a permalloy soft magnetic circuit. The different special support configurations account for a low torsional compliance with the overhanging beams. In order to deduce the equivalent stiffness coefficient of BM systems, mechanical modeling of three types of torsion/cantilever-based MEMS BMs was performed by the classical beam theorem. Meanwhile, the magnetostatic latching force was also deduced by the Maxwell electromagnetism theory. The performances of these MEMS BMs have been compared by the evaluation of static deformation variations, equivalent stiffness coefficients and dynamical switching characterizations. Finally, mechanical performance was characterized by atomic force microscopy, combined with a Nanoindentation Tester. In addition, bistabilities of the MEMS BMs were proved by theoretical analysis as well as experimental results. Among these BMs, the ring-shaped MEMS BM is extremely prone to deflect due to relatively low stiffness compared with other types. The torsion/cantilever-based MEMS BMs have potential application in the field of latching relays with low power consumption.

show abstract

Section: Introductionmentioning

confidence: 99%

Torsion/cantilever-based MEMS bistable mechanisms with different support configurations: structure design and comparison

Wu¹,

Zhang

Wang

et al. 2011

J. Micromech. Microeng.

View full text Add to dashboard Cite

show abstract

“…This behavior of the BMs is of particular importance at the microlevel when power consumption and heat dissipation are often a major concern. Thus, BMs are gaining more attentions in MEMS applications such as accelerometers (Hansen et al 2007), positioners (Zubir et al 2009), valves (Luharuka and Hesketh 2008), actuators (Dieppedale et al 2004, Gray andKohl 2006), switches (Freudenreich et al 2003;Lee and Wu 2005;Mardivirin et al 2009), andmicro-relays (Kruglick andPister 1998;Ruan et al 2001;Qiu et al 2005;Fu et al 2007;Wu et al 2010a, b).…”

Section: Introductionmentioning

confidence: 99%

“…Electromagnetic (Ruan et al 2001;Gray and Kohl 2006) actuation has many advantages over the electrostatic , piezoelectric (Mahameed et al 2008) and electrothermal (Nordquist et al 2009) actuation. For example, they can also be large in magnitude (on the order of milliNewtons) and effective over a long range (on the order of millimeters).…”

Section: Introductionmentioning

confidence: 99%

“…As far as the aforementioned disadvantages are concerned, the microcantilever beam in place of the complicated coil structures becomes a promising alternative for the critical components in numerous MEMS switching devices (Gray and Kohl 2006;Huang and Shen 2006). The MEMS devices make use of the bending displacement of the microcantilever to facilitate transduction for sensing or actuation.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Modeling, microfabrication and experiments of a free–free cantilever bistable micro mechanism supported with a diamond configuration

Wang

Yan

et al. 2010

Microsyst Technol

View full text Add to dashboard Cite

Bistable micro mechanisms are gaining great attention in MEMS applications. This paper presents the mechanical modeling and experimental characterization of a bistable torsion/cantilever micro latching mechanism for performing low power bistable relay applications. The bistable micro mechanism consists of two cantilevers which form symmetrical rocker levers. The free-free cantilever is suspended by a diamond skeleton which in turn is attached to a torsion cantilever. A permanent magnet is placed beside for holding the closed state with a permalloy soft magnetic circuit. The special diamond support is designed to enhance the stiffness of the overhang beams. In order to deduce the spring stiffness of system, a mechanical modeling of the leveraged torsion/cantilever system was performed by Castigliano's theorem. Meanwhile, the magnetostatic latching force was also deduced by the Maxwell electromagnetism theory. Then the device has been prepared by a laminated copper sacrificial layer process. This process can facilitate the fabrication complexities of traditional magnetic device with coil structures. Finally, mechanical performance was characterized by an atomic force microscopy, combined with finite element simulation using ANSYS TM package and analysis model as well. Two stable states of the micro mechanism were hold successfully with no power consumption by interferoscope profilometry of WYKO optical profiling system.

show abstract

“…No known tool can manage the coupling magneto-mechanic with contact analysis, that is the reason why the modeling of contact are often strongly approximated [1], [2]. In this paper, a new model and tool for semi-analytical magneto-mechanic coupling with contact analysis is presented.…”

Section: Introductionmentioning

confidence: 99%

Semi-analytical Magnetic-Structural coupling with contact analysis for MEMS/NEMS

Quang

Delinchant

Coulomb

et al. 2010

Digests of the 2010 14th Biennial IEEE Conference on Electromagnetic Field Computation

View full text Add to dashboard Cite

Modeling and Performance of a Magnetic MEMS Wiping Actuator

Cited by 7 publications

References 8 publications

Torsion/cantilever-based MEMS bistable mechanisms with different support configurations: structure design and comparison

Torsion/cantilever-based MEMS bistable mechanisms with different support configurations: structure design and comparison

Modeling, microfabrication and experiments of a free–free cantilever bistable micro mechanism supported with a diamond configuration

Semi-analytical Magnetic-Structural coupling with contact analysis for MEMS/NEMS

Contact Info

Product

Resources

About