Abstract:This article presents a design, modeling and optimization of Surface Acoustic Wave (SAW) resonator with CMOS compatible piezoelectric crystal material and characterized for wireless 915 MHz ISM frequency band. Simulation study for the realization of SAW resonator based on CMOS compatible piezoelectric thin film of Zinc oxide (ZnO) on passivated silicon (SiO2/Si) substrate is performed. The SAW properties of ZnO film on SiO2/Si were analyzed with three composite structures as (IDT)/ZnO/SiO2/Si, ZnO/(IDT)/ZnO/Si… Show more
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