Modeling and optimization of a novel two-axis mirror-scanning mechanism driven by piezoelectric actuators

Abstract

Mirror-scanning mechanisms are a key component in optical systems for diverse applications. However, the applications of existing piezoelectric scanners are limited due to their small angular travels. To overcome this problem, a novel two-axis mirror-scanning mechanism, which consists of a two-axis tip-tilt flexure mechanism and a set of piezoelectric actuators, is proposed in this paper. The focus of this research is on the design, theoretical modeling, and optimization of the piezoelectric-driven mechanism, with the goal of achieving large angular travels in a compact size. The design of the two-axis tip-tilt flexure mechanism is based on two nonuniform beams, which translate the limited linear output displacements of the piezoelectric actuators into large output angles. To exactly predict the angular travels, we built a voltage-angle model that characterizes the relationship between the input voltages to the piezoelectric actuators and the output angles of the piezoelectric-driven mechanism. Using this analytical model, the optimization is performed to improve the angular travels. A prototype of the mirror-scanning mechanism is fabricated based on the optimization results, and experiments are implemented to test the two-axis output angles. The experimental result shows that the angular travels of the scanner achieve more than 50 mrad, and the error between the analytical model and the experiment is about 11%. This error is much smaller than the error for the model built using the previous method because the influence of the stiffness of the mechanical structure on the deformation of the piezoelectric stack is considered in the voltageangle model.

Modeling and Optimization of a Novel ScAlN-Based MEMS Scanning Mirror with Large Static and Dynamic Two-Axis Tilting Angles

“…Therefore, the gravity effect of the mirrors during the analysis can be ignored to simplify theoretical calculations and simulations. Table 4 compares the static performance of Devices A and B presented in this paper with other piezoelectric scanning mirrors reported in the literature [ 11 , 21 , 42 , 43 , 44 ]. It is demonstrated that the proposed devices tend to exhibit an outstanding θ · D product.…”

A piezoelectric-based infinite stiffness generation method for strain-type load sensors

“…To protect the piezoelectric stack and ensure its expansion amplitude during use, it is necessary to design a clamping and fixing structure for the piezoelectric stack [14,15]. Preloading of the piezoelectric stack is necessary to prevent the piezoelectric stack from escaping from the structure.…”

Development of a two-DOF piezoelectric posture alignment mechanism with low coupling based on a cross-orthogonal-axis structure

“…All in all, the PAMs based on PZT stack actuators aligned in parallel and flexible hinge magnifying mechanisms by directing driving method can achieve high resolution and fast response, but they generally cannot reach the range of millimeter level or degree level due to the short stroke of PZT stack [25][26][27], and the decoupling characteristic and the cost are usually contradictory (reducing the mechanical coupling by increasing the number of actuators). In addition, the structure with flexible hinge mechanism usually reduces the stiffness of PAMs [28][29][30].…”