Modeling and Optimal Design of Membrane Based Fast-Tool-Servo for Freeform Manufacturing of Micro Optical Lens Array

Yang, Zhi; Zhou, Wei; Chen, Xin; Chen, Xin Du; Li, Ke Tian

doi:10.4028/www.scientific.net/kem.552.411

Cited by 6 publications

(2 citation statements)

References 2 publications

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“…However, it is still a challenge to fabricate these surfaces with high quality and high efficiency due to their complicated shapes. Fast tool servo (FTS)-assisted ultra-precision diamond turning technique has been extensively regarded to be a very promising technology for the fabrication of the micro-structured functional surfaces [5][6][7][8][9][10][11].…”

Section: Introductionmentioning

confidence: 99%

Determining issues in optimal turning of micro-structured functional surfaces

Zhang

Liu

Zhou

et al. 2015

Int J Adv Manuf Technol

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Micro-structured surfaces have received everincreasing requirements in various fields, including optical systems, biological engineering, measurement system, and so on. Fast tool servo (FTS)-assisted ultra-precision diamond turning technique has been extensively regarded to be a very promising technology for the fabrication of the microstructured functional surfaces with high efficiency and high surface quality. In this paper, the machining flowchart is thoroughly introduced; the key cutting parameters including tool geometry, diamond turning machine (DTM) slide carriage feedrate, and spindle speed are carefully investigated and determined to obtain optimal cutting performances during machining processes. Additionally, a novel toolpath generation method is proposed to minimize the volume of the toolpath data. Comparing with current method, the data volume generated by the new method can be significantly decreased by several times. Finally, the efficiency of the proposed cutting parameter determination method and the new toolpath generation method are verified by fabricating a typical sinusoidal grid surface.

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Section: Introductionmentioning

confidence: 99%

Determining issues in optimal turning of micro-structured functional surfaces

Zhang

Liu

Zhou

et al. 2015

Int J Adv Manuf Technol

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“…However, there exists vertical displacement jump when the flexure hinges are driven by a voice coil motor or a piezoelectric actuator. Therefore, Zhijun Yang et.al [3] presented a new amplified structure allowing the horizontal motion while reducing the vertical displacement jump. The working principle is that, the piezoelectric actuator is apply to a beam which has two flexure hinges, one is linked to the frame, and the other is linked to tool holder which is situated through two parallel membranes.…”

Section: Introductionmentioning

confidence: 99%

The Development of an Displacement Sensor Embedded Voice Coil Motor Based Fast-Tool-Servo for the Machining of Micro-Structure

Yang

Bai

Wang

et al. 2014

KEM

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The Fast Tool Servo (FTS) is widely used for the machining of micro-structures, especially for optical micro lens array. The working principle of FTS is that a voice coil motor or a piezoelectric (PZT) actuator is used as the driving elements, and the flexure hinges are developed as the guide mechanisms. In addition, an optical encoder is applied to measure the displacement. However, the existing design of FTS is too complicated and expensive. One reason is that the stroke of the FTS for the fabrication of optical micro lens array is only a few hundred micrometers, while its precision reaches to nanometric range, thus the optical encoder in not applicable. On the other hand, there exists sluggish and creep for piezoelectric materials, which makes the control of displacement difficult. This paper develops a displacement sensor embedded voice coil motor. In the design, the driving element is ampere force of the voice coil motor which is a linear ratio to the input current. Both the two covers are thin plates which serve as compliant mechanism by supporting the deformation at the Radial direction and provide linear stiffness in the axial direction. Therefore, the output displacement is proportional to the ampere force. The existence of external force affects the actual displacement, an embedded capacitor serves as displacement sensor will detects the real displacement, and the external force can be estimated by the current and measured displacement, which makes the motion control easy. At the same time, a multiphysics model of the developed FTS is built in this study by using finite element method and the displacement control under different cutting force is studied. The experimental results show that the developed FTS is efficient for achieving short stroke with high precision.

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Review on fast tool servo machining of optical freeform surfaces

Zhu

Fang

et al. 2017

Int J Adv Manuf Technol

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Modeling and Optimal Design of Membrane Based Fast-Tool-Servo for Freeform Manufacturing of Micro Optical Lens Array

Cited by 6 publications

References 2 publications

Determining issues in optimal turning of micro-structured functional surfaces

Determining issues in optimal turning of micro-structured functional surfaces

The Development of an Displacement Sensor Embedded Voice Coil Motor Based Fast-Tool-Servo for the Machining of Micro-Structure

Review on fast tool servo machining of optical freeform surfaces

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