Modeling and nonlinear analysis of a micro-switch under electrostatic and piezoelectric excitations with curvature and piezoelectric nonlinearities

Bahrami, Mohammad; Yousefi‐Koma, Aghil; Raeisifard, Hamed

doi:10.1007/s12206-013-0961-6

Cited by 19 publications

(6 citation statements)

References 20 publications

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“…The prefabricated piezoelectric actuators were obtained from Thor Labs Company, and have the following characteristics: a displacement range of 450 microns, a hysteresis effect larger than 15%, and a curie temperature of 230 • C. Although in this study the actuator motion is usually ruled by a single oscillating mode [19][20][21], this is commonly used as a simplified form of mathematical representation, typically presented as a partial differential equation. This simplified form satisfies an ordinary differential equation based on applying a spatial discretization method, which is obtained using Galerkin's method [22][23][24]. Based on this technique, the temporal-spatial motion of the actuator, u z (x, t), can be represented as u z (x, t) = t φ(x).…”

Section: Gripper Based On Parallel Arrange Of Piezoelectric Actuatorsmentioning

confidence: 99%

Robust Control of a Bimorph Piezoelectric Robotic Manipulator Considering Ellipsoidal-Type State Restrictions

et al. 2022

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The current study presents an adaptive control approach to solve the tracking trajectory problem for a robotic manipulator that uses a gripper based on bimorph piezoelectric actuators. The development of an adaptive gain state feedback form that considers the state restrictions is proposed using a novel class of barrier Lyapunov function that drives the effective control of joints and piezoelectric actuators. The proposed method allows for the inclusion of complex combinations of state restrictions in the Lyapunov function, yielding the construction of differential forms for the gains in the controller that can handle the evolution of trajectories of the robotic arm inside the restricted region. The proposed control design successfully tracks reference trajectories for both joints of the robotic arm as well as the motion of the piezoelectric device during several operative scenarios. A comprehensive experimental study evaluates the effect of introducing state-dependent gain considering state restrictions of the ellipsoidal type. The comparison of the mean square error confirms the contributions of the developed control action, showing better tracking quality for less control power with the same evaluation, which is a desirable characteristic in the controlled motion of micromanipulators. The proposed controller solves the tracking trajectory problem for the micromanipulation system, satisfies the motion restrictions, and allows better tracking performance to be enforced. Furthermore, comparison of the obtained trajectories seems to validate the proposed controller’s contribution concerning a feedback form with fixed gains.

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Section: Gripper Based On Parallel Arrange Of Piezoelectric Actuatorsmentioning

confidence: 99%

Robust Control of a Bimorph Piezoelectric Robotic Manipulator Considering Ellipsoidal-Type State Restrictions

et al. 2022

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“…However, accelerometers always consume a certain amount of power even without an external excitation [ 13 , 14 , 15 ]. The main disadvantages of electrostatic and piezoelectric microswitches are their high drive voltage and low reliability [ 16 , 17 , 18 ]. An inertial MEMS switch combines sensing and actuation.…”

Section: Introductionmentioning

confidence: 99%

Research Progress of MEMS Inertial Switches

Liu

Niu

et al. 2022

Micromachines

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As a typical type of MEMS acceleration sensor, the inertial switch can alter its on-off state while the environmental accelerations satisfy threshold value. An exhaustive summary of the design concept, performance aspects, and fabrication methods of the micro electromechanical system (MEMS) inertial switch is provided. Different MEMS inertial switch studies were reviewed that emphasized acceleration directional and threshold sensitivity, contact characteristics, and their superiorities and disadvantages. Furthermore, the specific fabrication methods offer an applicability reference for the preparation process for the designed inertial switch, including non-silicon surface micromachining technology, standard silicon micromachining technology, and the special fabrication method for the liquid inertial switch. At the end, the main conclusions of the current challenges and prospects about MEMS inertial switches are drawn to assist with the development of research in the field of future engineering applications.

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“…Compared with the piezoelectric microswitch [ 9 ] and electrostatic microswitch [ 10 ], the dynamic response performance of the piezoelectric microswitch and electrostatic microswitch is more stable and the closing time of the switch is controllable. The inertial switch proposed in this paper realizes the switch closure under the drive of inertial force.…”

Section: Introductionmentioning

confidence: 99%

Design, Simulation, and Fabrication of a New Three-Axis Inertial Switch with a Triangular Movable Electrode Structure

Chen

Wang

et al. 2022

Micromachines

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A new three-axis inertial switch is proposed. The triangle-structured movable electrode is designed to improve the inertial switch’s dynamic response performance, especially the movable electrode’s dynamic stability performance. The static mechanical analysis indicated that the displacement of the movable electrode to the fixed electrode in the sensitive direction is the minimum when the acceleration is applied to this designed inertial switch. The dynamic simulation analysis showed that the threshold of the designed inertial is about 235 g. The threshold in the non-sensitive direction is about 240 g, 270 g, 300 g, and 350 g when the directions of applied acceleration deviate 15°, 30°, 45°, and 60° from the sensitive direction, respectively. These results indicated that the designed inertial could resist the impact in non-sensitive directions and improve the stability in sensitive directions. The prototype of the inertial switch was fabricated and tested successfully. The testing results indicate that the threshold of the fabricated inertial switch is about 219 g. The test results verify the dynamic stability performance of the designed inertial switch.

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Modeling and nonlinear analysis of a micro-switch under electrostatic and piezoelectric excitations with curvature and piezoelectric nonlinearities

Cited by 19 publications

References 20 publications

Robust Control of a Bimorph Piezoelectric Robotic Manipulator Considering Ellipsoidal-Type State Restrictions

Robust Control of a Bimorph Piezoelectric Robotic Manipulator Considering Ellipsoidal-Type State Restrictions

Research Progress of MEMS Inertial Switches

Design, Simulation, and Fabrication of a New Three-Axis Inertial Switch with a Triangular Movable Electrode Structure

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