Modeling and measurements of MEMS gyroscopes

Pryputniewicz, Ryszard J.; Tan, X. Gary; Przekwas, Andrzej

doi:10.1109/plans.2004.1308982

Cited by 7 publications

(2 citation statements)

References 15 publications

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“…The microgyroscope (aka MEMS gyroscope, or microgyro) sensor is a Coriolis-force electrostatic comb driven, tuning fork (i.e., differential pair) design 14 . In the configuration shown in Fig.…”

Section: Representative Mems Samplesmentioning

confidence: 99%

“…The corresponding frequencies of the three modes displayed show good correlation with the frequencies determined analytically, well within the uncertainty limits 42 . More specifically, fundamental resonance frequencies for the first three bending modes of the microcantilevers considered herein can be expressed as 14 Following procedures used to obtain representative results shown in this Section, displacements, deformations and motions of other MEMS and structures can be determined.…”

Section: Deformations Of a Cantilever Microcontactmentioning

confidence: 99%

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Advances in optoelectronic methodology for micro- and nano-scale measurements

Pryputniewicz

2007

SPIE Proceedings

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Advances in emerging technologies of microelectromechanical systems (MEMS) and nanotechnology, especially relating to the applications, constitute one of the most challenging tasks in today's micromechanics and nanomechanics. In addition to design, analysis, and fabrication capabilities, this task also requires advanced test methodologies for determination of functional characteristics of devises produced to enable verification of their operation as well as refinement and optimization of specific designs. In particular, development of miniscule devices requires sophisticated design, analysis, fabrication, testing, and characterization tools.These tools can be categorized as analytical, computational, and experimental. Solutions using the tools from any one category alone do not usually provide necessary information on MEMS and extensive merging, or hybridization, of the tools from different categories is used. One of the approaches employed in this development of structures of contemporary interest, is based on a combined use of the analytical, computational, and experimental solutions (ACES) methodology. Development of this methodology was made possible by recent advances in optoelectronic methodology, which was coupled with the state-of-the-art computational methods, to offer a considerable promise for effective development of various designs. This approach facilitates characterization of dynamic and thermomechanical behavior of the individual components, their packages, and other complex material structures. In this paper, recent advances in optoelectronic methodology for micro-and nanoscale measurements are described and their use is illustrated with representative examples.

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Section: Representative Mems Samplesmentioning

confidence: 99%

Section: Deformations Of a Cantilever Microcontactmentioning

confidence: 99%