2006
DOI: 10.1016/j.precisioneng.2005.06.004
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Modeling and identification of an electrostatic motor

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Cited by 60 publications
(50 citation statements)
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“…The skew effect was considered by taking moving average of the original results over 1.5 times electrode pitch. (19) Comparisons of the results with the measured values in §3.2 are shown in Fig. 11.…”
Section: Fem Model For Calculating Capacitancesmentioning
confidence: 89%
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“…The skew effect was considered by taking moving average of the original results over 1.5 times electrode pitch. (19) Comparisons of the results with the measured values in §3.2 are shown in Fig. 11.…”
Section: Fem Model For Calculating Capacitancesmentioning
confidence: 89%
“…(17)- (19) The generalized model shown in Fig. 3, which has mphase for the slider and n-phase for the stator, can be modeled using the capacitance network shown in Fig.…”
Section: Induced Voltages and Forces Of M-to-n Phase Combinationmentioning
confidence: 99%
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“…The motor comprises a pair of boards, which function as a slider and a stator. In a board, three-phase skewed electrodes [20] are allocated at an interval of 200 μm. Between the boards, a myriad of glass beads with 20 μm in diameter are disseminated to reduce the friction.…”
Section: Development Of a 2-dof Electrostatic Haptic Joystickmentioning
confidence: 99%