Modeling and control of electrostatically levitated MEMS

Abstract

A system for electrostatically suspending a silicon disk between two sets of electrodes is reported. The electrodes exert electrostatic forces on the disk and also measure differential capacitances related to the disk position. There are no electrodes that directly exert in-plane forces on the disk sidewall, however, tilting the disk relative to the plane of the electrodes does exert lateral forces. Additional lateral-sensing electrodes are then used to determine the disk's lateral position so precise positioning of the disk is possible without any disk contact. Experimental stabilization results are reported.