2008
DOI: 10.1007/s00542-008-0560-0
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Modeling and characterization of a micromachined artificial hair cell vector hydrophone

Abstract: In the paper, a micromachined artificial vector hydrophone arises from a biological inspiration, the fish hair cell is presented. It is desirable that the application of piezoresistive effects combined with ingenious bionic structure and MEMS technology may improve the lowfrequency sensitivity of the vector hydrophone as well as its miniaturization. Modeling processes for realizing the artificial hair cell hydrophone, along with preliminary characterization results in terms of sensitivity, frequency response a… Show more

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Cited by 37 publications
(23 citation statements)
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“…For example, some researchers adopted piezoresistive principle to design vector hydrophone (Zhang et al 2008;Xue et al 2007). Other researchers focused on flow measurement in air (Ozaki et al 2000;Wang et al 2007;Song et al 2011), although not for underwater applications, they also have the potential to be redesigned for underwater applications.…”
Section: Piezoresistive Allfsmentioning
confidence: 99%
“…For example, some researchers adopted piezoresistive principle to design vector hydrophone (Zhang et al 2008;Xue et al 2007). Other researchers focused on flow measurement in air (Ozaki et al 2000;Wang et al 2007;Song et al 2011), although not for underwater applications, they also have the potential to be redesigned for underwater applications.…”
Section: Piezoresistive Allfsmentioning
confidence: 99%
“…Water flow rate and direction can be accurately detected using these sensory hair cells. Such sensors can be mainly classified based on sensing method into piezoresistive effect [9,10], piezoelectric effect [11,12], capacitive principle [13][14][15][16], and ionic polymer-metal composites (IPMC) [17][18][19][20]. Two main factors that play a pivotal role in efficient flow biosensors are high sensitivity and resolution.…”
Section: Introductionmentioning
confidence: 99%
“…We have designed the cilia-type underwater acoustic vector detection bionics structure (Zhang et al 2008), which combines acoustic theory with MEMS device design theory. This structure takes fish's lateral line organs in Sect.…”
Section: Structure Designmentioning
confidence: 99%