Modeling and analysis of a 2-DOF bidirectional electro-thermal microactuator

Elbüken, Çağlar; Topaloglu, Nezih; Nieva, P.; Yavuz, Mustafa; Huissoon, Jan P.

doi:10.1007/s00542-009-0789-2

Cited by 22 publications

(10 citation statements)

References 21 publications

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“…The analytical model of Boutchich et al predicted the dependence of the restoring force on the input electrical power and topology of a thermal actuator [15]. A two-step analytical model of a four-hot arm U-shape electrothermal actuator that can achieve bidirectional motion in two axes has been developed by Elbuken et al [40]. Finally, Mayyas and Stephanou obtained closed-form solutions for the thermal modelling of a general 5 non-homogeneous, lineshape microbeam's actuator using 1-D steady state heat equations under both heat conduction and convection [41].…”

Section: Analytical Modellingmentioning

confidence: 99%

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Dynamic modelling for thermal micro-actuators using thermal networks

López-Walle

Gauthier

Chaillet

2010

International Journal of Thermal Sciences

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a b s t r a c tThermal actuators are extensively used in microelectromechanical systems (MEMS). Heat transfer through and around these microstructures are very complex. Knowing and controlling them in order to improve the performance of the micro-actuator, is currently a great challenge. This paper deals with this topic and proposes a dynamic thermal modelling of thermal micro-actuators. Thermal problems may be modelled using electrical analogy. However, current equivalent electrical models (thermal networks) are generally obtained considering only heat transfers through the thickness of structures having considerable height and length in relation to width (walls). These models cannot be directly applied to microactuators. In fact, micro-actuator configurations are based on 3D beam structures, and heat transfers occur through and around length. New dynamic and static thermal networks are then proposed in this paper. The validities of both types of thermal networks have been studied. They are successfully validated by comparison with finite elements simulation and analytical calculations.

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Section: Analytical Modellingmentioning

confidence: 99%

“…Finite element (FE) based simulations [1,17,40,41] or experimental measurements [3,15,17,18] were usually performed to validate analytical models. Analytic solutions for describing thermal problems are only available for simple geometries.…”

Section: Analytical Modellingmentioning

confidence: 99%

Dynamic modelling for thermal micro-actuators using thermal networks

López-Walle

Gauthier

Chaillet

2010

International Journal of Thermal Sciences

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“…Thus, the current passing through the cold arm caused the heating of that arm structure as well. It is possible to have a MEMS electrothermal actuator with more than two arm structures, where the current passes through at least two arms (called hot arms, and other arms without any current are called cold arms) [ 35 , 36 , 37 ].…”

Section: Optimized Actuator-cantilever Setupmentioning

confidence: 99%

Submillimeter Sized 2D Electrothermal Optical Fiber Scanner

Kaur

Menon

2022

Sensors

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Optical scanners are used frequently in medical imaging units to examine and diagnose cancers, assist with surgeries, and detect lesions and malignancies. The continuous growth in optics along with the use of optical fibers enables fabrication of imaging devices as small as a few millimeters in diameter. Most forward viewing endoscopic scanners contain an optical fiber acting as cantilever which is vibrated at resonance. In many cases, more than one actuating element is used to vibrate the optical fiber in two directions giving a 2D scan. In this paper, it is proposed to excite the cantilever fiber using a single actuator and scan a 2D region from its vibrating tip. An electrothermal actuator is optimized to provide a bidirectional (horizontal and vertical) displacement to the cantilever fiber placed on it. A periodic current, having a frequency equal to the resonant frequency of cantilever fiber, was passed through the actuator. The continuous expansion and contraction of the actuator enabled the free end of fiber to vibrate in a circle like pattern. A small change in the actuation frequency permitted the scanning of the area inside the circle.

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“…The basic two-arm electrothermal actuators design uses the principle of Joule heating for thermal expansion and movement. The thermal actuator can be categorized as in-plane and out of plane actuator [10], [11], where driving mechanism behind the two type of actuator is hot (narrow arm) and cold (wider arms) beam actuation and bimorph actuation. The potential application of electrothermal actuators includes optical switching [12], [13] and microgrippers [14] and micro robotic application [15].…”

Section: Introductionmentioning

confidence: 99%

Design and Validation of Silicon-on-Insulator Based U Shaped Thermal Microactuator

Kumar¹,

Sharma²

2014

IJMMM

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Abstract-This paper presents design and fabrication of a MEMS thermal actuator using SOI technology. The thermal actuators are used in, micro grippers, micro mirror and switching applications by applying voltage on different contact pads, causing beams with pseudo bimorph characteristics heated, thereby the microactuator can produce lateral motion in plane or out of plane. The narrow or hot arm heats up and expands more than the wide or cold arm deflecting the device toward the cold arm. Thermal actuators are more power efficient than electrostatic actuators. The present work carries the design, fabrication and characterization of the thermal actuator wherein numerical simulation are carried out in COMSOL multiphysics tool and fabrication was done at MUMPS facility MEMSCAP. The simulated results on displacement versus voltage are verified experimentally.

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Modeling and analysis of a 2-DOF bidirectional electro-thermal microactuator

Cited by 22 publications

References 21 publications

Dynamic modelling for thermal micro-actuators using thermal networks

Dynamic modelling for thermal micro-actuators using thermal networks

Submillimeter Sized 2D Electrothermal Optical Fiber Scanner

Design and Validation of Silicon-on-Insulator Based U Shaped Thermal Microactuator

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