Model for quantitative analysis of reflection-electron-energy-loss spectra: Angular dependence

Yubero, F.; Sanz, J. M.; Ramskov, B.; Tougaard, S.

doi:10.1103/physrevb.53.9719

Cited by 171 publications

(204 citation statements)

References 26 publications

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“…al. [13,16,18,[20][21][22][23][24][25] have employed the semi-classical dielectric response model proposed by Tougaard and Yubero [26][27][28][29] in their calculation of ELF. The algorithms of this method have been implemented in the generally available QUEELS-(k,)-REELS software package [29].…”

Section: Experimental Methodsmentioning

confidence: 99%

“…(6) with  i as an adjustable parameter. The values of the momentum dispersion coefficient  i are related to the effective mass, e.g,  i 0 for insulator and  i 1 for metals [14,[27][28][29]. The step function  ( −E g ) is included to describe the effect of the band gap energy E g in semiconductors and insulators.…”

Section: Experimental Methodsmentioning

confidence: 99%

“…The dielectric function is given in term of the energy loss function (ELF) Im(-1/) which is parameterized as a sum of DrudeLindhard type oscillators, as described in Refs. [14,15,[27][28][29]:…”

Section: Experimental Methodsmentioning

confidence: 99%

“…REELS is surface sensitive and the spectra carries information on the electronic structure of the material because the energy loss experienced by the incident electron depends on the electronic structure of the material. The spectra can easily be recorded over a wide energy-loss range [13][14][15][16][17][18][19][20][21][22][23][24][25][26][27][28][29]. The calculation of the ELFs of zirconium oxide, silicon dioxide, and zirconium silicates from REELS spectra has already been performed by Tahir et.…”

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confidence: 99%

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Stopping Powers and Inelastic Mean Free Path of 100 eV to 30 keV Electrons in Zirconium Silicates

et al. 2013

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We have determined the electron stopping power (SP) and inelastic mean free path (IMFP) of (ZrO 2 ) x (SiO 2 ) 1-x (x=1, 0.75, 0.5, 0.25, 0) for electron energies from 100 eV to 30 keV by means of modified Born-Ochkur equations. The energy loss function (ELF) is required in the calculation of SP and IMFP. We used the electron energy losses from 0 to 80 eV obtained by quantitative analysis of reflection electron energy-loss spectroscopy (REELS) spectra. The values of SP and IMFP for high contents of ZrO 2 (x=50% and x=75%) in Zr-silicates are similar to those of ZrO 2 , and similar to those of SiO 2 for low contents of ZrO 2 (x=25%) in Zr-silicates. There are small differences in the values of SP and IMFP for ZrO 2 and SiO 2 . We found that the SP decreases while the IMFP increases with increasing electron energy. We have demonstrated that the ELF obtained from the quantitative analysis of REELS spectra provide us with a straightforward way to determine SP and IMFP for alloy materials by using modified Born-Ochkur equations.

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Section: Experimental Methodsmentioning

confidence: 99%

Section: Experimental Methodsmentioning

confidence: 99%

Section: Experimental Methodsmentioning

confidence: 99%

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confidence: 99%

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Stopping Powers and Inelastic Mean Free Path of 100 eV to 30 keV Electrons in Zirconium Silicates

et al. 2013

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“…It is a widely used technique e.g. for determining the dielectric constant of the surface layer [2], measurement of the valence-electron density [3], the topography of the surface [4], ion bombardment induced damage [5], the band alignment of ultra thin gate oxide [6] etc.…”

Section: Introductionmentioning

confidence: 99%

Detection of nanoparticles by means of reflection electron energy loss spectroscopy depth profiling

Menyhárd¹

2013

J. Phys. D: Appl. Phys.

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The various studies of nanoparticles are of great importance because of the wide application of nanotechnology. The shape and structure of the nanoparticles can be determined by transmission electron microscopy (TEM) while their chemistry by electron energy loss spectroscopy (EELS).TEM sample preparation is an expensive and difficult procedure, however. Surface sensitive, analytical techniques, like Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy (XPS) are well applicable to detect the atoms that make up the nanoparticles, but cannot tell whether particle-formation occurred. On the other hand, reflection electron loss spectroscopy (REELS) probes the electronic structures of atoms, which are strongly different for the atoms being in solution or in precipitated form. If the particle size is in the nm range, plasmon resonance can be excited in it, which appears as a loss feature in REELS spectrum. Thus, by measuring AES (XPS) spectra parallel with those of REELS, besides the atomic concentrations the presence of the nanoparticles can also be identified. As an example, the appearance of nano particles during ion beam induced mixing of C/Si layer will be shown.2

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Surface excitation parameters of low-energy electrons crossing solid surfaces

Kwei

Wang

Tung

1998

Surf. Interface Anal.

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Model for quantitative analysis of reflection-electron-energy-loss spectra: Angular dependence

Cited by 171 publications

References 26 publications

Stopping Powers and Inelastic Mean Free Path of 100 eV to 30 keV Electrons in Zirconium Silicates

Stopping Powers and Inelastic Mean Free Path of 100 eV to 30 keV Electrons in Zirconium Silicates

Detection of nanoparticles by means of reflection electron energy loss spectroscopy depth profiling

Surface excitation parameters of low-energy electrons crossing solid surfaces

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