Model for Effects of RF Bias Frequency and Waveform on Si Damaged-Layer Formation during Plasma Etching

Abstract

We study the ADHM construction of instantons in N = 2 supersymmetric Yang-Mills theory deformed in constant Ramond-Ramond (R-R) 3-form field strength background in type IIB superstrings. We compare the deformed instanton effective action with the effective action of fractional D3/D(−1) branes at the orbifold singularity of C 2 /Z 2 in the same R-R background. We find discrepancy between them at the second order in deformation parameters, which comes from the coupling of the translational zero modes of the D(−1)-branes to the R-R background. We improve the deformed action by adding a term with space-time dependent gauge coupling. Although the space-time action differs from the action in the Ω-background, both actions lead to the same instanton equations of motion at the lowest order in gauge coupling.