Model Design of Piezoelectric Micromachined Modal Gyroscope

Abstract

This paper reports a novel kind of solid-state microgyroscope, which is called piezoelectric micromachined modal gyroscope (PMMG). PMMG has large stiffness and robust resistance to shake and strike because there is no evident mass-spring component in its structure. This work focused on quantitative optimization of the gyroscope, which is still blank for such gyroscope. The modal analysis by the finite element method (FEM) was firstly conducted. A set of quantitative indicators were developed to optimize the operation mode. By FEM, the harmonic analysis was conducted to find the way to efficiently actuate the operational mode needed. The optimal configuration of driving electrodes was obtained. At last, the Coriolis analysis was conducted to show the relation between angular velocity and differential output voltage by the Coriolis force under working condition. The results obtained in this paper provide theoretical basis for realizing this novel kind of micromachined gyroscope.

Higher-Order Overtone Thickness-Shear Vibrations of Multilayered Thin-Film Acoustic Wave Resonators and Angular Rate Sensing

“…2 Recently, micromachined, multilayered thin films of AlN and ZnO have been produced for acoustic wave resonator applications. 10 They belong to micromachined devices [11][12][13][14][15] and are much thinner than conventional crystal plate TSh gyroscopes of quartz or lithium niobate. This leads to higher frequencies and potentially higher sensitivity.…”

BaTiO3and TeO2based gyroscopes for guidance systems: FEM analysis

“…In addition, we discuss the fixing problem of the gyroscope, analyze the principle of operation, and find a resonance mode detecting point. Piezoelectric micromachined gyroscope (PMMG) is completely solid and has a simple structure [17]. When the mode frequency AC voltage is applied, mode vibration of piezoelectric materials obtained (as material we used BaTiO 3 and paratellurite as reference vibrations.…”