Model and Analysis of Piezoelectric Actuator in Practical Three-Stage Mechanism

Levy, Dror A.; Shapiro, Amir

doi:10.1007/s12541-020-00369-x

Cited by 5 publications

(16 citation statements)

References 38 publications

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“…Such actuators can convert electrical energy into mechanical energy under an electric field and produce precision mechanical displacement [1][2][3]. High precision micro-drive and micro-positioning technology are needed in the technical fields of optical engineering [4], microelectronic manufacturing [5], aerospace [6], ultra-precision manufacturing [7], micro-robotics [8,9], medicine and genetic engineering [10,11]. Precision actuators with a piezoelectric component as the core show micro/nano displacement resolution.…”

Section: Introductionmentioning

confidence: 99%

Finite Element Modeling and Test of Piezo Disk with Local Ring Electrodes for Micro Displacement

et al. 2022

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A new piezoelectric actuator combining interdigitated ring electrodes and a PZT-52(Lead Zirconate Titanate) disk was investigated for the large displacement requirements of piezoelectric actuators. Finite element models were established according to the structural characteristics of the actuator and static analysis was carried out based on ANSYS software. Then Ø25 mm × 2 mm samples were prepared. The displacement detection system was established, and the influence of electrode structure on radial displacement was studied experimentally. A comparison between the experimental results and the finite element analysis confirmed that the finite element model was correct. The results showed that the effect of electrode width on displacement was small. With decrease in electrode center distance and increase in the number of electrodes pairs, the radial displacement increased correspondingly. The peak of radial displacement was 1.63 μm under a 200 V voltage excitation voltage of 0.2 Hz. This was 2.5 times that for a conventional electrode piezo disk with the same structure. The actuator demonstrated better displacement properties. The piezoelectric disk could be valuable in applications involving micro-nano devices.

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Section: Introductionmentioning

confidence: 99%

Finite Element Modeling and Test of Piezo Disk with Local Ring Electrodes for Micro Displacement

et al. 2022

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“…In a previous piece of work [ 24 ], a detailed model and mathematical analysis of the integration of PEMs in the amplification mechanism and the coupling between them as well as between the applied load were presented. In addition, the model deals with several nonlinear phenomena that can be found in such systems.…”

Section: Introductionmentioning

confidence: 99%

“…In addition, the model deals with several nonlinear phenomena that can be found in such systems. One of the more common phenomena in PEMs is the hysteresis phenomenon, which was studied in depth in a previous article by researchers [ 24 ].…”

Section: Introductionmentioning

confidence: 99%

“…Therefore, the first step is the modeling of the PEMs’ behavior. This task is particularly challenging due to nonlinearity, time variance, and the hysteresis phenomena of the PEMs [ 24 ]. These phenomena have not been fully uncovered yet.…”

Section: Introductionmentioning

confidence: 99%

“…However, in this review, we focused on system identification approaches in order to model the PEMs without actually going through the details of those phenomena, besides the hysteresis that was described in detail in a previous article [ 24 ].…”

Section: Introductionmentioning

confidence: 99%

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System Identification and Mathematical Modeling of A Piezoelectric Actuator through A Practical Three-Stage Mechanism

Levy

Shapiro

2022

Micromachines

Self Cite

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Piezoelectric elements (PEMs) are used in a variety of applications. In this paper, we developed a full analytical model and a simple system identification (SI) method of a piezoelectric actuator, which includes piezostack elements and a three-stage amplification mechanism. The model was derived separately for each unit of the system. Next, the units were combined, while taking into account their coupling. The hysteresis phenomenon, which is significant in piezoelectric materials, is described extensively. The theoretical model was verified in a laboratory setup. This setup includes a piezoelectric actuator, measuring devices and an acquisition system. The measured results were compared to the theoretical results. Some of the most well-known forms of system identification are shown briefly, while a new and simple algorithm is described systematically and verified by the model. The main advantage of this work is to provide a solid background and domain knowledge of modelling and system identification methods for further investigations in the field of piezoelectric actuators. Due to their simplicity, both the model and the system identification method can be easily modified in order to be applied to other PEMs or other amplification mechanism methods. The main novelty of this work lies in applying a simple system identification algorithm while using the system-level approach for piezoelectric actuators. Lastly, this review work is concluded and some recommendations for researchers working in this area are presented.

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Sensorless model-based displacement estimator for piezoelectric actuator through a practical three-stage mechanism

Dror,

Shapiro

2024

Heliyon

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Model and Analysis of Piezoelectric Actuator in Practical Three-Stage Mechanism

Cited by 5 publications

References 38 publications

Finite Element Modeling and Test of Piezo Disk with Local Ring Electrodes for Micro Displacement

Finite Element Modeling and Test of Piezo Disk with Local Ring Electrodes for Micro Displacement

System Identification and Mathematical Modeling of A Piezoelectric Actuator through A Practical Three-Stage Mechanism

Sensorless model-based displacement estimator for piezoelectric actuator through a practical three-stage mechanism

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