Model and Analysis of a High Sensitivity Resonant Optical Read-Out Approach Suitable for Cantilever Sensor Arrays

Putrino, Gino; Keating, Adrian; Martyniuk, Mariusz; Faraone, Lorenzo; Dell, John

doi:10.1109/jlt.2012.2190973

Cited by 19 publications

(9 citation statements)

References 20 publications

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“…Destructive interference reduces output signal to minimum at this separation. Figure 2 (c) compares simulation and measurement results for suspended microcantilever as a function of the waveguidemicrocantilever gap [16,17]. The intensity of the light transmitted through the waveguide is amplitude modulated by movement of the MEMS microcantilever.…”

Section: Sensing Technologymentioning

confidence: 99%

Towards MEMS-based chem/bio sensing arrays with on-chip optical read-out

Martyniuk¹

2015

ELECTROTECHNICAL REVIEW

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Sensing on the microscale using microelectromechanical systems (MEMS) has established itself commercially as one of the dominant world-wide sensing technologies, providing commercialised sensing solutions for pressure, inertia, temperature, as well as for more challenging applications in remote infrared imaging and energy harvesting. However, to date MEMS has not delivered any commercially successful chem/bio sensor, even though it has been established for some time that microcantilever-based sensing can detect chem/bio agents at the level of single molecules or even zeptograms (10 -21 g). The widespread application of this class of sensors has been largely impeded by the lack of a technology capable of performing high-resolution measurements of large arrays of MEMS devices. We demonstrate a technology capable of filling that need that is based on MEMS suspended microcantilevers and an on-chip optical read-out, and show an implementation of an effective toluene sensor.Streszczenie. Mikroczujniki wykonane w technologii MEMS zdominowały światowe technologie dostarczając rozwiązań komercyjnych do pomiaru ciśnienia, bezwładności i temperatury. Pojawiły się również bardziej zaawansowane zastosowania w dziedzinie zobrazowania podczerwieni i kumulacji energii. Do dzisiaj jednak nie udało się zademonstrować komercyjnego czujnika chemiczno-biologicznego, chociaż raporty o wysokiej czułości mikro-belek umożliwiające rejestrację pojedynczej molekuły (zeptogramy, 10 -21 g) są już dostępne w literaturze. Głównym problemem ograniczającym rozwój tej technologii jest brak metod umożliwiających pomiar odkształcenia matryc mikro-belek z wysoką rozdzielczością. Artykuł prezentuje technologię otrzymania wymaganej rozdzielczości dla dużych matryc mikro-belek w technologii MEMS z wykorzystaniem metod optycznych. Jako przykład zastosowania przedstawiono rezultaty dla czujnika toluenu. Rozwój czujników MEMS z zintegrowanym systemem odczytu

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Section: Sensing Technologymentioning

confidence: 99%

Towards MEMS-based chem/bio sensing arrays with on-chip optical read-out

Martyniuk¹

2015

ELECTROTECHNICAL REVIEW

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“…MEMS-based packages have been demonstrated, for vertical-cavity surface emitting lasers [12]. In addition, movable apertures and reflectors have been developed using MEMS technology for a variety of applications [13]- [19]. As an optical switch, [13] presents a physical-parameter design of a 2D switch used for all-optical cross connects.…”

Section: Introductionmentioning

confidence: 99%

“…Optical read-out methods are also of great utility in detecting the deflection of MEMS cantilevers and resonators. For instance, [19] proposes an optical read-out method based on interferometers suitable for cantilever sensor array.…”

Section: Introductionmentioning

confidence: 99%

Integrated Silicon Photovoltaics on CMOS With MEMS Module for Catheter Tracking

Kouhani

Camli

Cakaci

et al. 2015

J. Lightwave Technol.

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This work presents an electromagnetic actuation based, optoelectronic active catheter tracking system for magnetic resonance imaging (MRI). The system incorporates a radio frequency (RF) micro electro mechanical system (MEMS) resonator array actuated by the Lorentz force induced due to the strong dc magnetic field available in MRI environment. Power transfer to the system and the actuation detection are done optically via fiber optic cables that replace conventional conductive transmission lines; thereby enabling the tracking system to function safely under MRI. The complementary metaloxide-semiconductor (CMOS) receiver, optically powered by a supply unit housing an on-chip silicon photovoltaic cell, detects the location of the catheter tip. The RF MEMS resonator array transmits the position data by transducing the electrical signal into a resonant mechanical vibration linearly. The optical reading of this actuation can be done by diffraction grating interferometry or laser Doppler vibrometry. The fabricated resonator array is tested with the optically powered CMOS chip (0.18 µm UMC technology) in laboratory conditions. The driving electrical current supplied by the chip for resonator actuation is 25 µA rms, where the magnetic field provided by the experimental setup is 0.62 T. The resonator array is observed to be functional with real world application by showing a frequency response of 10 dB, which will be enhanced further under the stronger magnetic field available in 3 T MRI.

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“…1, which has previously been analyzed numerically using FDTD [4]. The effect of the cantilever is modelled as a perturbation of the effective grating efficiency from its baseline value α to α pert .…”

Section: Introductionmentioning

confidence: 99%