Mode Shift of a Thin-Film F-P Cavity Grown with ICPCVD
Yuheng Zhang,
Zhuo Gao,
Jian Duan
et al.
Abstract:Industrial-grade optical semiconductor films have attracted considerable research interest because of their potential for wafer-scale mass deposition and direct integration with other optoelectronic wafers. The development of optical thin-film processes that are compatible with complementary metal-oxide-semiconductor (CMOS) processes will be beneficial for the improvement of chip integration. In this study, a multilayer periodically structured optical film containing Fabry–Perot cavity was designed, utilizing … Show more
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