Mode-selective control of thermal Brownian vibration of micro-resonator (Generation of a thermal no-equilibrium state by mechanical feedback control)

Kawamura, Yoshiyuki; Kanegae, Riki

doi:10.1063/1.5003615

Cited by 4 publications

(1 citation statement)

References 27 publications

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“…The first is direct cryogenic cooling of the microcantilever, in which all of the vibration modes are equally cooled, but the experimental system for this is very large and complex 8–10 . The second is active mechanical feedback damping of the vibration amplitude 11–14 , in which only selected vibration modes are cooled down 15 . The feedback control system becomes sensitive to external vibration, but is relatively small.…”

Section: Introductionmentioning

confidence: 99%

Mechanical feedback cooling assisted by optical cavity cooling of the thermal vibration of a microcantilever

Kawamura

2019

Sci Rep

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This study describes a new two-step process to cool the thermal vibration of microcantilevers. The process combines active mechanical feedback cooling and optical cavity cooling. A micro-Fabry–Perot interferometer, built in-house, is set atop a microcantilever to measure the vibration amplitude, the high optical power density of which induces cavity cooling in the optical cavity. Using a two-step cooling procedure, the equivalent temperature of the thermal vibration of a microcantilever is lowered from room temperature to the theoretical cooling limit of 0.063 K, a much lower temperature than that achieved via simple cavity cooling (18 K), and then by mechanical feedback cooling (0.135 K) obtained for the same type of microcantilevers in previous studies. This experimental demonstration showcases a new type of cooling process of the amplitude of thermal vibration for micro-mechanical resonators to a lower temperature and does not need additional cooling using a conventional cryogenic refrigerator.

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Section: Introductionmentioning

confidence: 99%

Mechanical feedback cooling assisted by optical cavity cooling of the thermal vibration of a microcantilever

Kawamura

2019

Sci Rep

Self Cite

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Micro Fabry-Pérot Interferometer at Rayleigh Range

Tsujiie

Kawamura

2018

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The Fabry-Pérot interferometer is used in a variety of high-precision optical interferometry applications, such as gravitational wave detection. It is also used in various types of laser resonators to act as a narrow band filter. In addition, ultra-compact Fabry-Pérot interferometers are used in the optical resonators of semiconductor lasers and fiber-optic systems. In this work, we developed a micro-scale Fabry-Pérot interferometer that was constructed within the Rayleigh range of the optical focusing system. The high precision that is conventionally required for the optical parallelism and the surface accuracy of the mirrors was not so critical for this type of Fabry-Pérot interferometer. The interferometer was constructed using a gold-coated silicon microcantilever with reflectivity of 92% and a dielectric multilayer flat mirror with reflectivity of 85%. The focal spot size of the laser beam is 20 μm and the cavity length is approximately 20 μm. The finesse was measured to be approximately 25. The interferometric characteristics of the device were consistent with the theoretically calculated performance. The developed micro Fabry-Pérot interferometer has the potential to make a marked contribution to advances in optical measurements in various micro sensing system.

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Effective quality factor tuning mechanisms in micromechanical resonators

Miller

Ansari

Heinz

et al. 2018

Applied Physics Reviews

108

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Quality factor (Q) is an important property of micro- and nano-electromechanical (MEM/NEM) resonators that underlie timing references, frequency sources, atomic force microscopes, gyroscopes, and mass sensors. Various methods have been utilized to tune the effective quality factor of MEM/NEM resonators, including external proportional feedback control, optical pumping, mechanical pumping, thermal-piezoresistive pumping, and parametric pumping. This work reviews these mechanisms and compares the effective Q tuning using a position-proportional and a velocity-proportional force expression. We further clarify the relationship between the mechanical Q, the effective Q, and the thermomechanical noise of a resonator. We finally show that parametric pumping and thermal-piezoresistive pumping enhance the effective Q of a micromechanical resonator by experimentally studying the thermomechanical noise spectrum of a device subjected to both techniques.

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Mode-selective control of thermal Brownian vibration of micro-resonator (Generation of a thermal no-equilibrium state by mechanical feedback control)

Cited by 4 publications

References 27 publications

Mechanical feedback cooling assisted by optical cavity cooling of the thermal vibration of a microcantilever

Mechanical feedback cooling assisted by optical cavity cooling of the thermal vibration of a microcantilever

Micro Fabry-Pérot Interferometer at Rayleigh Range

Effective quality factor tuning mechanisms in micromechanical resonators

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