1997
DOI: 10.1007/s11664-997-0205-6
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Mode of arsenic incorporation in HgCdTe grown by MBE

Abstract: The results of arsenic incorporation in HgCdTe layers grown by molecular beam epitaxy (MBE) are reported. Obtained results indicate that arsenic was successfully incorporated as acceptors in MBE-HgCdTe layers after a low temperature anneal. Secondary ion mass spectrometry and Hall effect measurements confirm that arsenic is incorporated with an activation yield of up to 100%. This work confirms that arsenic can be used as an effective dopant of MBE-HgCdTe after a low temperature annealing under Hg-saturated co… Show more

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Cited by 42 publications
(25 citation statements)
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“…12 It is well established that post-growth annealing is an effective way to activate As to acceptors by transferring As atoms to Te sublattices. 26,27 In order to find the lowest annealing temperature necessary for activation and to understand the effect of Hg on the process, post-growth annealing was carried out at different partial pressures of Hg and at different temperatures. The partial pressure of Hg was controlled by the Hg temperature by using a dualtemperature-zone closed quartz ampule.…”
Section: Arsenic Incorporationmentioning
confidence: 99%
“…12 It is well established that post-growth annealing is an effective way to activate As to acceptors by transferring As atoms to Te sublattices. 26,27 In order to find the lowest annealing temperature necessary for activation and to understand the effect of Hg on the process, post-growth annealing was carried out at different partial pressures of Hg and at different temperatures. The partial pressure of Hg was controlled by the Hg temperature by using a dualtemperature-zone closed quartz ampule.…”
Section: Arsenic Incorporationmentioning
confidence: 99%
“…Up to $10 18 cm -3 , 100% activation of the arsenic can be achieved by an anneal at 400°C to 500°C followed by a vacancy-filling anneal at 250°C, both under Hg saturated conditions. 9 As-grown layers are n-type with n $ 1% of the As concentration. 2,10,11 Again, this approximates to the annealed carrier concentration for undoped MBE material indicating that the As is inactive.…”
Section: Literature Review Of Arsenic Doping In Mctmentioning
confidence: 99%
“…Control of substrate temperature, in particular, has been a significant issue with respect to control of p-type doping due to the sensitivity of As incorporation to substrate temperature. 2,28 The electrical activity of As has been shown to diminish at concentrations above approximately 2 x 10 18 cm -3 . Excessive As doping at 10 20 cm -3 has also been shown to have a deleterious effect on dislocation density in the p-layer and topmost N -layer of N-p-n devices.…”
Section: Multispectral Detectorsmentioning
confidence: 99%