of external perturbation, controllable mode conversion with polarization change can be implemented. Recently, several methods have been proposed to achieve this goal. For example, waveguides with asymmetric cross-sections, [13][14][15][16][17][18] including L shape and double-stair shape, as well as asymmetric metallic cover layers, [19][20][21] can break the orthogonality of TE 0 and TM 0 mode and hence produce direct conversion between them. Such devices can function as polarization rotators, since the input and output modes always share the same mode order but with different polarization directions. Another method for polarization manipulation is based on mode evolution, where a mode hybridization region is used to gradually convert the input mode into the orthogonal polarization with the same or higher order. [11,22] However, this strategy requires a large length of the mode hybridization region up to hundreds of micrometers because it should satisfy the adiabatic transition condition.Metasurfaces, which are made up of an array of artificial subwavelength structures to locally manipulate the amplitude, phase, and polarization of light, represent one frontier in photonics research. [23][24][25][26][27][28][29][30][31][32] Based on elaborately designed metasurfaces, novel applications such as holographic image display, [33][34][35][36][37][38][39][40][41] imaging with meta-lenses, [42][43][44][45][46][47] orbital angular momentum (OAM) beam generation, [48][49][50][51][52][53] and polarization manipulation [54][55][56][57][58][59] have been demonstrated. However, most of these metasurfaces operate in free space, and the entire systems still consist of bulky optical components including light sources, mirrors, polarizers, etc. To further reduce the overall size and complexity, researchers have recently investigated the hybrid platform by integrating metasurfaces with photonic waveguides that preserve the merits of each system. Applications like mode converters, polarization rotators, second-harmonic generation, on-chip wavefront shaping and OAM lasers have been reported. [60][61][62][63][64][65][66][67] With the assistance of metasurfaces, the wavevector of the guided mode can be modified and the mode coupling coefficient can be optimized, ensuring the efficient conversion from the fundamental mode to higher-order mode. On the other hand, 2D phase shaping of the input planar waveguide mode was realized by deliberately controlling the local phase or refractive index with metasurfaces. [66,68,69] However, to the best of our knowledge, a universal and straightforward method for arbitrarily converting TM modes to TE modes or wavefront shaping for the cross-polarized waves is still lacking.In this paper, we propose a new design strategy for mode converters and polarization rotators utilizing on-chip C-shaped In this work, mode conversion and wavefront shaping by integrating a metallic metasurface on top of a planar waveguide are proposed and demonstrated. The metasurface consists of C-shaped nanoantennas. By controll...