2011
DOI: 10.4236/jmp.2011.25042
|View full text |Cite
|
Sign up to set email alerts
|

MOCVD of Molybdenum Sulphide Thin Film Via Single Solid Source Precursor Bis-(Morpholinodithioato-s,s’)-Mo

Abstract: A single solid source precursor bis-(morpholinodithioato-s,s')-Mo was prepared and molybdenum sulphide thin film was deposited on sodalime glass using Metal Organic Chemical Vapour Deposition (MOCVD) technique at deposition temperature of 420˚C. The film was characterized using Rutherford Backscattering Spectroscopy (RBS), Ultraviolet-Visible Spectroscopy, Four-point Probe technique, Scanning Electron Microscopy (SEM), X-ray Diffractometry (XRD) and Atomic Force Microscopy (AFM). A direct optical band gap of 1… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
2
1

Citation Types

1
15
0

Year Published

2014
2014
2023
2023

Publication Types

Select...
7

Relationship

1
6

Authors

Journals

citations
Cited by 14 publications
(16 citation statements)
references
References 44 publications
(67 reference statements)
1
15
0
Order By: Relevance
“…It has also been reported earlier in another paper that the ratio was approximately 2:1 at deposition temperature of 420 °C [15]. The deposition temperature also controls the thickness of the films.…”
Section: Compositional Studiessupporting
confidence: 73%
See 2 more Smart Citations
“…It has also been reported earlier in another paper that the ratio was approximately 2:1 at deposition temperature of 420 °C [15]. The deposition temperature also controls the thickness of the films.…”
Section: Compositional Studiessupporting
confidence: 73%
“…The growth of molybdenum sulphide from a single solid source precursor using MOCVD at deposition temperature of 420 °C has been previously demonstrated [15]. However, in this present study, the effect of deposition temperature (while other parameters are kept constant) on the stoichiometry, morphology, roughness as well as the electrical and optical properties of molybdenum sulphide thin films deposited by MOCVD technique using a single solid source precursor has been investigated.…”
Section: Introductionmentioning
confidence: 87%
See 1 more Smart Citation
“…1. The MOCVD setup is a locally adapted design that had been used in previous studies [28][29][30][31][32][33][34]. It is simple, cost effective, and suitable for large-scale production of various thin films for different applications.…”
Section: Methodsmentioning
confidence: 99%
“…More recently, 2D materials have been explored as copper diffusion barriers in CMOS interconnect structures [12][13][14][15]. Furthermore, to enable the use of 2D materials in technology applications, processes have been developed to grow 2D materials via chemical vapour deposition (CVD) [16,17] and atomic layer deposition (ALD) [18,19]. The films prepared via thin film deposition were comparable in performance to materials obtained via exfoliation.…”
Section: Introductionmentioning
confidence: 99%