MOCVD of LaMnO₃ on Biaxially Textured Ni‐based Substrates in a Reducing Atmosphere

Abstract

The metal±organic (MO) CVD process was modified to allow the in-situ deposition of perovskite manganites on biaxially textured Ni-based metal tapes (RABiTS). The modification consists of the creation of the protective atmosphere by simultaneous introduction of ammonia and water. Such an atmosphere prevents the oxidation of Ni and the reduction of manganites into non-perovskite phases. MOCVD experiments were accomplished in the band-type reactor using the band evaporation system at 800 C and 850 C. Orthorhombic LaMnO 3 film demonstrates (101) orientation (i.e. (001) orientation in cubic perovskite notation) minimizing lattice mismatch with the nickel substrate. The film stoichiometry, total pressure, water and ammonia flows greatly influence the quality of the film orientation. The oriented perovskite manganite films on Ni tapes can be used as buffers for high T c superconductors for high current applications as well as magnetoresistance-based sensors of the magnetic field.